Co与掺杂Si固相反应形成CoSi2接触pn结及反应过程中As的行为研究
刘平, 李炳宗, 姜国宝, 黄维宁, 顾志光
FORMATION OF pn JUNCTION WITH CoSi2 CONTACT BY SOLID STATE INTERACTION OF Co WITH DOPED Si AND ASENIC BEHAVIOR DURING THE INTERACTION
LIU PING, LI BINGZONG, JIANG GUOBAO, HUANG WEINING, GU ZHIGUANG
应用科学学报
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1993, (2): 125
-130
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