English
磁控溅射薄膜的厚度分布
范正修, 薛松生, 何朝玲
THICKNESS DISTRIBUTION OF THIN FILM DEPOSITED WITH MAGNETRO-SPUTTERING
FAN ZHENGXIU, XUE SONGSHENG, HE ZHAOLING
应用科学学报 . 1993, (2): 136 -140 .