金属杂质在硅中的分凝及其在器件工艺中的应用
郑国祥, 周寿通, 邬建根, 王昌平, 屈逢源, 丁志发
THE SEGREGATION OF METAL IMPURITIES IN SILICON AND ITS APPLICATION TO DEVICE TECHNIQUE
ZHENG GUOXIANG, ZHOU SHOUTONG, WU JIANGEN, WANG cHANGPING, QU FENGYUAN, DING ZHIFA
应用科学学报
.
1991, (3): 263
-268
.
