English
重掺砷衬底氧本征吸杂能力的探讨
谭淞生, 朱德光, 王自筠
INTRINSIC GETTERING EFFECTIVENESS IN HEAVILY ARSENIC-DOPED SILICON
TAN SONGSHENG, ZHU DEGUANG, WANG ZIYUN
应用科学学报 . 1989, (2): 179 -181 .