English
用10.6μm红外激光辐照在硅中掺入铝和锑制备大面积p-n结的研究
钟涛, 林理彬, 范安辅
INVESTIGATION ON PREPARATION OF p-n JUNCTION OF LARGE AREA BY IRRADIATION DOPING AI OR Sb IN Si USING 10.6 μm INFRA RED LASER
ZHONG TAO, LIN LIBIN, PAN ANFU
应用科学学报 . 1992, (3): 241 -246 .