真空电弧沉积簿膜厚度分布计算

王浩, 邹积岩, 杨磊, 程礼椿, 欧阳红林

CALCULATION OF FILM THICKNESS DISTRIBUTION PROVIDED BY VACUUM ARC DEPOSITIONWANG

WANG HAO, ZOU JIYAN, YANG LEI, CHENG LICHUN, OUYANG HONHLIN

应用科学学报 . 1995, (3): 339 -346 .