English
透射干涉法测量蓝宝石上薄外延硅层的厚度
蔡希介, 陈庆贵, 史日华, 王其闵
TRANSMISSION INTERFERENCE METHOD FOR MEASURING THE THICKNESS OF THIN SOS FILMS
CAI XIJIE, CHEN QINGGUI, SHI RIHUA, WANG QIMIN
应用科学学报 . 1984, (2): 170 -174 .