Journal of Applied Sciences ›› 1996, Vol. 14 ›› Issue (4): 475-480.
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OHENG ZHONGYUAN, ZOU JIYAN, YANG LEI, ZHANG HANMING
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Abstract: This paper discusses the feasibility of using the Langmuir probe as a diagnostic tool for plasma in Vacuum Arc Coating (VAC) processes, and the validity of probe theories in this situation. A system has been set up for the in situ diagnosis of VAC plasma. Plasma parameters have been diagnosed nuder various process parameters.
Key words: Langmuir probe, vacuum are coating, plasma diagnosis
OHENG ZHONGYUAN, ZOU JIYAN, YANG LEI, ZHANG HANMING. LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES[J]. Journal of Applied Sciences, 1996, 14(4): 475-480.
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https://www.jas.shu.edu.cn/EN/Y1996/V14/I4/475
