Abstract: A numerical Inversion method of ellipsometry has been developed for determining optical constants and thickness of the uniaxial anisotropio film, the optical axis of which is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometrio equations for the separate calculation of optical constants and thickness of the film, and reduce the three-parameter problem to a two-parameter one. A flow chart of the numerical inverse program is given and an example applied to L-B films is illustrated.

Key words: anisotropio ellipsometry, Inverse method, Langmuir-Blodgett film