Abstract: A non-scanning 3-D profile detecting system based on astigmatic method is developed. In this detecting system, a 2-D light source array produced by a micro-optic component is used to form a parallel micro-astigmatism system. The whole-field detection of measuring plane is realized simultaneously. As the differential arithmetic of facula intensity is used, the noise and the shift of light source can be restrained effectively and the high axial resolution is achieved at a larger sampling interval. The measuring efficiency and accuracy are increased simultaneously. The construction and working principle of the no-scanning 3-D detecting system is studied, the method of 3-D profile reconstruction is recommended, and the experiment result is obtained as well.

Key words: 3-D profile, parallel detecting, microlens array, astigmatism