Abstract: The detective method of coherent signals of the microwave coherent polariza-tion scatterometer is proposed.A frequency modulation-continuous wave (FM-CW) is adopted for the scatterometer,The emphases are laid on the generation of coher-ent signals for FM-CW and the detective method of coherent amplitude and phase signals. In the end,the experimental resultsare presented for a newly developed L-B and coherent polarization scatterometer.

Key words: Scatterometer, Caherent Scattering