Abstract: The kinetic properties of electron capture in solid dielectric under strong electrical field are studied with surface potential measurement in this paper. With respect to the different mechanisms of carrier injection by the field, the authors take thermal emission and impact ionization into account, respectively. The improved first-order capture kinetic equations can explain qualitatively the processes of electron capture and the variation of the steady-state values captured by traps with the fields. It is found that in the range approaching the field of breakdown, the electrons in the conduction band will collide with the trapped, resulting in the trapped electrons detrapping. Once the detrapping reaches a certain value, breakdown occurs.

Key words: kinetic, solid dielectric, electron capture