Journal of Applied Sciences ›› 1988, Vol. 6 ›› Issue (2): 103-108.

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THE MEASUREMENT OF CURVATURE RADⅡ OF SLIGHTLY BENT CRYSTALS BY (nV,-nS)DOUBLE-CRYSTAL DIFFRACTOMETRY

CHEN JINGYI, LI RUNSHEN, XU SHUNSHENG   

  1. Shanghai Institute of Metallurgy, Academia Sinica
  • Received:1986-09-10 Revised:1987-05-17 Online:1988-06-30 Published:1988-06-30

Abstract: The Dumond graphic method is employed in the analysis of crystal curvature radius measurement. A new method for measuring the curvature radius using the (nv,-ns) double-crystal diffractometry with 1 spectrum only is proposed. This method is much more sensitive than the usually used (ns,-ns) double-crystal diffractometry with the Ka doublet method. The detectable limit of curvature can be improved about one order of magnitude. The curvature radius of the Si crystal after As+ ion implantation is measured by (nv,-ns) double-crystal diffractometry.