A breakdown model for RESURF lateral power device is developed. Based on the analysis of the breakdown mechanism in RESURF lateral power device, charges in the drift region are allocated to lateral and vertical junctions along the diagonal of the sharing area. This model can be used to investigate breakdown characteristics of the device when the drift region is fully or partially depleted. Besides, the model provides simple expressions with clear physical concepts. A new RESURF criterion is also derived to quantitate the upper and lower limits, which is useful to the design of the structure parameters. General agreements exist between the modeling results and the reported experimental results.
ZHANG Jun, GUO Yu-feng, HUANG Shi, YAO Jia-fei, LIN Hong, XIAO Jian
. Breakdown Model of RESURF Lateral Power Devices Based on Charge-Sharing Effect[J]. Journal of Applied Sciences, 2014
, 32(2)
: 209
-214
.
DOI: 10.3969/j.issn.0255-8297.2014.02.014
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