Optical Fiber Sensors Technology

Research Progress of Fiber Micro Cavity Fabry-Perot Interference Sensors

Expand
  • College of Optical and Electronic Technology, China Jiliang University, Hangzhou 310018, China

Received date: 2019-12-23

  Online published: 2020-04-01

Abstract

Fiber microcavity sensors have gained widespread attention in the feld of optical fber sensing due to their inherent safety, small size, low cost, and resistance to electromagnetic interference. Fiber microcavity Fabry-Perot interference sensors features with multiple measurable parameters and the capability of simultaneous measurement of multiple parameters. This article reviews the research progress of the fber microcavity Fabry-Perot interference sensors in various sensing scenarios, such as temperature, pressure, liquid refractive index, hydrogen concentration, organic volatiles concentration and so on, and introduces the manufacturing method, sensing principle and experimental results of the sensors in detail.

Cite this article

ZHAO Chunliu, LI Jiali, XU Ben, GONG Huaping, WANG Dongning . Research Progress of Fiber Micro Cavity Fabry-Perot Interference Sensors[J]. Journal of Applied Sciences, 2020 , 38(2) : 226 -259 . DOI: 10.3969/j.issn.0255-8297.2020.02.003

References

[1] Giallorenzi T, Bucaro J, Dandridge A, et al. Optical fber sensor technology[J]. IEEE Journal of Quantum Electronics, 1982, 18(4):626-665.
[2] Kersey A D. A review of recent developments in fber optic sensor technology[J]. Optical Fiber Technology:Materials, Devices and Systems, 1996, 2(3):291-317.
[3] Wade S A, Collins S F, Baxter G W. Fluorescence intensity ratio technique for optical fber point temperature sensing[J]. Journal of Applied Physics, 2003, 94(8):4743-4756.
[4] Stewart G, Mencaglia A, Philp W, et al. Interferometric signals in fber optic methane sensors with wavelength modulation of the DFB laser source[J]. Journal of Lightwave Technology, 1998, 16(1):43-53.
[5] Garus D, Gogolla T, Krebber K, et al. Distributed sensing technique based on Brillouin optical-fber frequency-domain analysis[J]. Optics Letters, 1996, 21(17):1402-1404.
[6] Lu X, Soto M A, Luc Thévenaz. Temperature-strain discrimination in distributed optical fber sensing using phase-sensitive optical time-domain reflectometry references[J]. Optics Express, 2017, 25(14):16059-16071.
[7] Han M, Wang Y, Wang A. Grating-assisted polarization optical time-domain reflectometry for distributed fber-optic sensing[J]. Optical Letters, 2007, 32(14):2028-2030.
[8] Lee B. Review of the present status of optical fber sensors[J]. Optical Fiber Technology:Materials, Devices and Systems, 2003, 9(2):57-79.
[9] Rindorf L, Hoiby P E, Jensen J B, et al. Towards biochips using microstructured optical fber sensors[J]. Analytical and Bioanalytical Chemistry, 2006, 385(8):1370-1375.
[10] Wang Y P, Rao Y J. A novel long period fber grating sensor measuring curvature and determining bend-direction simultaneously[J]. IEEE Sensors Journal, 2005, 5(5):839-843.
[11] Qian W, Zhao C L, He S, et al. High-sensitivity temperature sensor based on an alcohol-flled photonic crystal fber loop mirror[J]. Optics Letters, 2011, 36(9):1548-1550.
[12] Wang Y P, Xiao L, Wang D N, et al. Highly sensitive long-period fber-grating strain sensor with low temperature sensitivity[J]. Optics Letters, 2007, 31(23):3414-3416.
[13] Qi L, Zhao C L, Wang Y, et al. Compact micro-displacement sensor with high sensitivity based on a long-period fber grating with an air-cavity[J]. Optics Express, 2013, 21(3):3193.
[14] Sun M, Xu B, Dong X, et al. Optical fber strain and temperature sensor based on an in-line Mach-Zehnder interferometer using thin-core fber[J]. Optics Communications, 2012, 285(18):3721-3725.
[15] Zhu T, Wu D, Liu M, et al. In-line fber optic interferometric sensors in single-mode fbers[J]. Sensors, 2012, 12(12):10430-10449.
[16] Qi L, Zhao C L, Yuan J, et al. Highly reflective long period fber grating sensor and its application in refractive index sensing[J]. Sensors and Actuators B:Chemical, 2014, 193(4):185-189.
[17] Chen F, Jiang Y, Zhang L, et al. Fiber optic refractive index and magnetic feld sensors based on micro-hole induced in-line Mach-Zehnder interferometers[J]. Measurement Science and Technology, 2017, 29(4):472-476.
[18] Zhuang X, Wang J, Deng Y, et al. Optical fber sensing technologies for pipeline leakage detection[J]. Optical Technique, 2011, 37(5):543-550.
[19] Kou J L, Feng J, Ye L, et al. Miniaturized fber taper reflective interferometer for high temperature measurement[J]. Optics Express, 2010, 18(13):14245-14250.
[20] Ning X P, Zhao C L, Shi F F, et al. Multipoint chemical vapor measurement by zeolite thin flm-coated Fresnel reflection-based fber sensors with an array-waveguide grating[J]. Sensors & Actuators B:Chemical, 2016, 227:533-538.
[21] Yu B, Kim D W, Deng J, et al. Fiber Fabry-Perot sensors for detection of partial discharges in power transformers[J]. Applied Optics, 2003, 42(16):3241-3250.
[22] Starodumov A N, Zenteno L A, Monzon D, et al. Fiber Sagnac interferometer temperature sensor[J]. Applied Physics Letters, 1997, 70(1):19-21.
[23] Huang S C, Lin W W, Tsai M T, et al. Fiber optic in-line distributed sensor for detection and localization of the pipeline leaks[J]. Sensors and Actuators A:Physical, 2007, 135(2):570-579.
[24] Wu C, Fu H Y, Qureshi K K, et al. High-pressure and high-temperature characteristics of a Fabry-Perot interferometer based on photonic crystal fber[J]. Optics Letters, 2011, 36(3):412-414.
[25] Deng J, Xiao H, Huo W, et al. Optical fber sensor-based detection of partial discharges in power transformers[J]. Optics and Laser Technology, 2001, 33(5):305-311.
[26] Zhu J J, Zhang A P, Xia T H, et al. Fiber-optic high-temperature sensor based on thin-core fber modal interferometer[J]. IEEE Sensors Journal, 2010, 10(9):1415-1418.
[27] Xiao G Z, Adnet A, Zhang Z, et al. Monitoring changes in the refractive index of gases by means of a fber optic Fabry-Perot interferometer sensor[J]. Sensors and Actuators A:Physical, 2005, 118(2):177-182.
[28] Gu B, Yin M, Zhang A P, et al. Optical fber relative humidity sensor based on FBG incorporated thin-core fber modal interferometer[J]. Optics Express, 2011, 19(5):4140-4146.
[29] Wong W C, Chan C C, Hu P, et al. Miniature pH optical fber sensor based on waist-enlarged bitaper and mode excitation[J]. Sensors and Actuators B:Chemical, 2014, 191:579-585.
[30] Li Z, Wang Y, Liao C, et al. Temperature-insensitive refractive index sensor based on in-fber Michelson interferometer[J]. Sensors and Actuators B:Chemical, 2014, 199:31-35.
[31] Bao X. Combined distributed temperature and strain sensor based on Brillouin loss in an optical fber[J]. Optics Letters, 1994, 19(2):141.
[32] 林之华,李朝锋,刘甲春. 光纤传感技术及其军事应用[J]. 光通信技术,2011, 35(7):4-6. Lin Z H, Li C F, Liu J C, et al. Optical fber sensing technology and its military application[J]. Optical Communication Technology, 2011, 35(7):4-6. (in Chinese)
[33] 刘铁根,王双,江俊峰,等. 航空航天光纤传感技术研究进展[J]. 仪器仪表学报,2014, 35(8):1681-1692. Liu T G, Wang S, Jiang J F, et al. Advances in optical fber sensing technology for aviation and aerospace application[J]. Chinese Journal of Scientifc Instrument, 2014, 35(8):1681-1692. (in Chinese)
[34] 张研. 光纤传感技术在水利工程的应用概述[J]. 山西建筑,2015, 41(18):220-221. Zhang Y. Summary of the application of optical fber sensing technology in hydraulic engineering[J]. Shanxi Architecture, 2015, 41(18):220-221. (in Chinese)
[35] Choi H Y, Park K S, Park S J, et al. Miniature fber-optic high temperature sensor based on a hybrid structured Fabry-Perot interferometer[J]. Optics Letters, 2008, 33(21):2455-2457.
[36] Wang C, Yan G, Lian Z, et al. Hybrid-Cavity Fabry-Perot interferometer for multi-point relative humidity and temperature sensing[J]. Sensors and Actuators B:Chemical, 2017, 255:1937-1944.
[37] Tsai W H, Lin C J. A novel structure for the intrinsic Fabry-Perot fber-optic temperature sensor[J]. Journal of Lightwave Technology, 2001, 19(5):682-686.
[38] Zhang G, Yang M, Wang M. Large temperature sensitivity of fber-optic extrinsic FabryPerot interferometer based on polymer-flled glass capillary[J]. Optical Fiber Technology, 2013, 19(6):618-622.
[39] Zhang L, Jiang Y, Gao H, et al. Simultaneous measurements of temperature and pressure with a dual-cavity Fabry-Perot sensor[J]. IEEE Photonics Technology Letters, 2018, 31:106-109.
[40] Lee C E, Taylor H F. Fiber-optic Fabry-Perot temperature sensor using a low-coherence light source[J]. Journal of Lightwave Technology, 1991, 9(1):129-134.
[41] Liu G, Han M. Fiber-optic gas pressure sensing with a laser-heated silicon-based Fabry-Perot interferometer[J]. Optics Letters, 2015, 40(11):2461-2464.
[42] Yu Q, Zhou X. Pressure sensor based on the fber-optic extrinsic Fabry-Perot interferometer[J]. Photonic Sensors, 2011, 1(1):72-83.
[43] Duan D W, Rao Y J, Hou Y S, et al. Microbubble based fber-optic Fabry-Perot interferometer formed by fusion splicing single-mode fbers for strain measurement[J]. Applied Optics, 2012, 51(8):1033-1036.
[44] Wang W, Jiang X, Yu Q. Temperature self-compensation fber-optic pressure sensor based on fber Bragg grating and Fabry-Perot interference multiplexing[J]. Optics Communications, 2012, 285(16):3466-3470.
[45] Zhou A, Qin B Y, Zhu Z, et al. Hybrid structured fber-optic Fabry-Perot interferometer for simultaneous measurement of strain and temperature[J]. Optics Letters, 2014, 39(18):5267-5670.
[46] Wei T, Han Y, Li Y, et al. Temperature-insensitive miniaturized fber inline Fabry-Perot interferometer for highly sensitive refractive index measurement[J]. Optics Express, 2008, 16(8):5764-5769.
[47] 时菲菲,赵春柳,徐贲,等. 基于光纤微腔的温度及折射率同时测量型传感器[J]. 光子学报,2016, 45(3):103-107. Shi F F, Zhao C L, Xu B, et al. Simultaneous measurement of refractive index and temperature based on optical fber cavity sensor[J]. Acta Photonica Sinica, 2016, 45(3):103-107. (in Chinese)
[48] Dong B, Hao J, Zhang T, et al. High sensitive fber-optic liquid refractive index tip sensor based on a simple inline hollow glass micro-sphere[J]. Sensors and Actuators B:Chemical, 2012, 171:405-408.
[49] Chen J H, Zhao J R, Huang X G, et al. Extrinsic fber-optic Fabry-Perot interferometer sensor for refractive index measurement of optical glass[J]. Applied Optics, 2010, 49(29):5592-5596.
[50] Ran Z, Rao Y, Zhang J, et al. A miniature fber-optic refractive-index sensor based on lasermachined Fabry-Perot interferometer tip[J]. Journal of Lightwave Technology, 2010, 27(23):5426-5429.
[51] Rao Y J, Deng M, Duan D W, et al. In-line fber Fabry-Perot refractive-index tip sensor based on endlessly photonic crystal fber[J]. Sensors and Actuators A:Physical, 2008, 148(1):33-38.
[52] Yang Z, Zhang M, Liao Y, et al. Extrinsic Fabry-Perot interferometric optical fber hydrogen detection system[J]. Applied Optics, 2010, 49(15):2736-2740.
[53] Zhang Y, Peng H, Qian X, et al. Recent advancements in optical fber hydrogen sensors[J]. Sensors and Actuators B:Chemical, 2017, 244:393-416.
[54] Wang Y, Yang M, Zhang G, et al. Fiber optic hydrogen sensor based on Fabry-Perot interferometer coated with Sol-Gel Pt/WO3 coating[J]. Journal of Lightwave Technology, 2015, 33(12):2530-2534.
[55] Wang S, Lu P, Liu L, et al. An infrasound sensor based on extrinsic fber-optic Fabry-Perot interferometer structure[J]. IEEE Photonics Technology Letters, 2016, 28(11):1264-1267.
[56] Tang J, Yin G, Liao C, et al. High-sensitivity gas pressure sensor based on Fabry-Perot interferometer with a side-opened channel in hollow-core photonic bandgap fber[J]. IEEE Photonics Journal, 2015, 7(6):1-7.
[57] Liu G, Sheng Q, Hou W, et al. Optical fber vector flow sensor based on a silicon Fabry-Perot interferometer array[J]. Optics Letters, 2016, 41(20):4629-4632.
[58] Mao B M, Zhou B, Lu C, et al. Magnetic feld sensor of enhanced sensitivity and temperature self-calibration based on silica fber Fabry-Perot resonator with silicone cavity[J]. Optics Express, 2017, 25(7):8108-8114.
[59] 刘申,廖常锐,王义平. 光纤气泡微腔传感技术[J]. 应用科学学报,2018, 36(1):104-147. Liu S, Liao C R, Wang Y P. Optical fber sensors based on in-fber air bubble microcavirties[J]. Journal of Applied Sciences, 2018, 36(1):104-147. (in Chinese)
[60] Pevec S, Donlagic D. Miniature all-fber Fabry-Perot sensor for simultaneous measurement of pressure and temperature[J]. Applied Optics, 2012, 51(19):4536-4541.
[61] Liu Y, Wang D N, Chen W P. Crescent shaped Fabry-Perot fber cavity for ultra-sensitive strain measurement[J]. Scientifc Reports, 2016, 6(1):38390-38398.
[62] Cibula E, Donlagic D. In-line short cavity Fabry-Perot strain sensor for quasi distributed measurement utilizing standard OTDR[J]. Optics Express, 2007, 15(14):8719-8730.
[63] Rao Y J, Deng M, Duan D W, et al. Micro Fabry-Perot interferometers in silica fbers machined by femtosecond laser[J]. Optics Express, 2007, 15(21):14123-14128.
[64] Wei T, Han Y, Tsai H L, et al. Miniaturized fber inline Fabry-Perot interferometer fabricated with a femtosecond laser[J]. Optics Letters, 2008, 33(6):536-538.
[65] Wang Y, Wang D N, Yang M, et al. Refractive index sensor based on a microhole in singlemode fber created by the use of femtosecond laser micromachining[J]. Optics Letters, 2009, 34(21):3328-3330.
[66] Liao C R, Hu T Y, Wang D N. Optical fber Fabry-Perot interferometer cavity fabricated by femtosecond laser micromachining and fusion splicing for refractive index sensing[J]. Optics Express, 2012, 20(20):22813-22818.
[67] Tian M, Lu P, Chen L, et al. Femtosecond laser fabricated in-line micro multicavity fber FP interferometers sensor[J]. Optics Communications, 2014, 316(7):80-85.
[68] Yang F, Tan Y, Jin W, et al. Hollow-core fber Fabry-Perot photothermal gas sensor[J]. Optics Letters, 2016, 41(13):3025-3028.
[69] Jia P, Fang G, Liang T, et al. Temperature-compensated fber-optic Fabry-Perot interferometric gas refractive-index sensor based on hollow silica tube for high-temperature application[J]. Sensors and Actuators B:Chemical, 2017, 244:226-232.
[70] Wang Y, Wang D N, Wang C, et al. Compressible fber optic micro-Fabry-Perot cavity with ultra-high pressure sensitivity[J]. Optics Express, 2013, 21(12):14084-14089.
[71] Yu Y, Chen X, Huang Q, et al. Enhancing the pressure sensitivity of a Fabry-Perot interferometer using a simplifed hollow-core photonic crystal fber with a microchannel[J]. Applied Physics B:Lasers & Optics, 2015, 120(3):461-467.
[72] Lee C L, Ho H Y, Gu J H, et al. Dual hollow core fber-based Fabry-Perot interferometer for measuring the thermo-optic coefcients of liquids[J]. Optics Letters, 2015, 40(4):459-462.
[73] Beard P C, Mills T N. Extrinsic optical-fber ultrasound sensor using a thin polymer flm as a low-fnesse Fabry-Perot interferometer[J]. Applied Optics, 1996, 35(4):663-675.
[74] Zhao Y, Chen M Q, Xia F. Small in-fber Fabry-Perot low-frequency acoustic pressure sensor with PDMS diaphragm embedded in hollow-core fber[J]. Sensors and Actuators A:Physical, 2017, 270:162-169.
[75] Li M, Liu Y, Gao R, et al. Ultracompact fber sensor tip based on liquid polymer-flled FabryPerot cavity with high temperature sensitivity[J]. Sensors and Actuators B:Chemical, 2016, 233:496-501.
[76] Jiang M, Gerhard E. A simple strain sensor using a thin flm as a low-fnesse fber-optic Fabry-Perot interferometer[J]. Sensors and Actuators A:Physical, 2001, 88(1):41-46.
[77] Xu B, Wang C, Wang D N, et al. Fiber-tip gas pressure sensor based on dual capillaries[J]. Optics Express, 2015, 23(18):23484-23492.
[78] Xu B, Liu Y, Wang D, et al. Optical fber Fabry-Perot interferometer based on an air cavity for gas pressure sensing[J]. IEEE Photonics Journal, 2017, 9(2):1-9.
[79] Deng M, Tang C P, Zhu T, et al. Refractive index measurement using photonic crystal fber-based Fabry-Perot interferometer[J]. Applied Optics, 2010, 49(9):1593-1598.
[80] Yu Y, Chen X, Huang Q, et al. Enhancing the pressure sensitivity of a Fabry-Perot interferometer using a simplifed hollow-core photonic crystal fber with a microchannel[J]. Applied Physics B:Lasers & Optics, 2015, 120(3):461-467.
[81] Choi H Y, Park K S, Park S J, et al. Miniature fber-optic high temperature sensor based on a hybrid structured Fabry-Perot interferometer[J]. Optics Letters, 2008, 33(21):2455-2457.
[82] Xu B, Liu Y M, Wang D N, et al. Fiber Fabry-Perot interferometer for measurement of gas pressure and temperature[J]. Journal of Lightwave Technology, 2016, 34(21):4920-4925.
[83] Zhu Y, Wang A. Miniature fber-optic pressure sensor[J]. IEEE Photonics Technology Letters, 2005, 17(2):447-449.
[84] Xu B, Yang Y, Jia Z, et al. Hybrid Fabry-Perot interferometer for simultaneous liquid refractive index and temperature measurement[J]. Optics Express, 2017, 25(13):14483-14493.
[85] Xu B, Li P, Wang D N, et al. Hydrogen sensor based on polymer-flled hollow core fber with Pt-loaded WO3/SiO2 coating[J]. Sensors and Actuators B:Chemical, 2017, 245:516-523.
[86] Li Y, Shen W, Zhao C, et al. Optical hydrogen sensor based on PDMS-formed double-C type cavities with embedded Pt-loaded WO3/SiO2[J]. Sensors and Actuators B:Chemical, 2018, 276:23-30.
[87] Park C, Joo K, Kang S, et al. A PDMS-coated optical fber Bragg grating sensor for enhancing temperature sensitivity[J]. Journal of the Optical Society of Korea, 2011, 15(4):329-334.
[88] Wu B, Zhao C, Xu B, et al. Optical fber hydrogen sensor with single Sagnac interferometer loop based on vernier effect[J]. Sensors and Actuators B:Chemical, 2018, 255:3011-3016.
[89] Zhang P, Tang M, Gao F, et al. Cascaded fber-optic Fabry-Perot interferometers with Vernier effect for highly sensitive measurement of axial strain and magnetic feld[J]. Optics Express, 2014, 22(16):19581-19588.
[90] Li Y, Zhao C L, Xu B, et al. Optical cascaded Fabry-Perot interferometer hydrogen sensor based on vernier effect[J]. Optics Communications, 2018, 414:166-171.
[91] Zhao C L, Han F, Li Y, et al. Volatile organic compound sensor based on PDMS coated Fabry-Perot Interferometer with vernier effect[J]. IEEE Sensors Journal, 2019, 19:4443-4450.
[92] Hou L, Zhao C L, Xu B, et al. Highly sensitive PDMS-flled Fabry-Perot interferometer temperature sensor based on the vernier effect[J]. Applied Optics, 2019, 58(18):4858-4865.
[93] Ying Y, Zhao C L, Gong H, et al. Demodulation method of Fabry-Perot sensor by cascading a traditional Mach-Zehnder interferometer[J]. Optics & Laser Technology, 2019, 118:126-131.
Outlines

/