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中文
ION IMPLANTATlON THROUGH CoSi
2
/Si AND SELF-ALIGNED SILICIDED MOS DEVICE TECHNOLOGY
LIU PING, LI BINGZONG, HUANG WEINING, JIANG GUOBAO, GU ZHIGUANG
Journal of Applied Sciences . 1994, (
4
): 401 -408 .
