应用科学学报 ›› 1984, Vol. 2 ›› Issue (4): 310-321.

• 论文 • 上一篇    下一篇

300~700兆赫透射式扫描声学显微镜的研究和试制

陈戈林, 李德杰, 张凤禧, 罗淑云, 应嘉年, 周宏朴, 胡思正, 金芬年, 周启博, 王华俭, 张克潜   

  1. 清华大学
  • 收稿日期:1983-11-25 出版日期:1984-12-31 发布日期:1984-12-31

RESEARCH AND DEVELOPMENT OF A TRANSMISSION SCANNING ACOUSTIC MICROSCOPE OPERATING AT 300~700 MHz

CHEN GELIN, LI DEJIE, ZHANG FENGXI, LUO SHUYUN, YING JIANING, ZHOU HONGPU, HU SIZHENG, JIN FENNIAN, ZHOU QIBO, WANG HUAJIAN, ZHANG KEQIAN   

  1. Tsinghua University
  • Received:1983-11-25 Online:1984-12-31 Published:1984-12-31

摘要: 在本文中作者描述了工作在300~700兆赫的透射式扫描声学显微镜的研究试制工作.介绍了显微镜的设计和结构,所用声学聚焦系统、换能器及显微镜的机械微波和电路部分.理论分析和实验结果表明该声学显微镜的分辨率不劣于2微米,达到了衍射极限.最后给出了使用该显微镜所获得的一些样品的图像.

Abstract: The research and development of a transmission scanning acoustic microscope operating at 300-700MHz is described. The design and construction of the microscope, the acoustic transducer-focusing system, the mechanical microwave and electronic systems are presented. Theoretical analysis and experimental results show that the resolution of the microscope is not worse than 2μm, i. e. the resolution reaches the refraction limitation. Finally, images of some specimens obtained by using the acoustic microscope are given.