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应用科学学报 ›› 1986, Vol. 4 ›› Issue (2): 126-131.

• 论文 • 上一篇    下一篇

三种含钽化合物场发射阴极

姜祥祺1, 加藤隆男2   

  1. 1. 复旦大学;
    2. 日电爱年华公司
  • 收稿日期:1984-05-30 修回日期:1985-01-08 出版日期:1986-06-30 发布日期:1986-06-30

THREE CATHODES OF TANTALUM COMPOUNDS FOR FIELD-EMISSION GUNS

JIANG XIANGQI1, KATO TAKEO2   

  1. 1. Fudan University;
    2. Anelva Corp., Tokyo, Japan
  • Received:1984-05-30 Revised:1985-01-08 Online:1986-06-30 Published:1986-06-30

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摘要： 采用电解腐蚀工艺制得了形态良好的钽场发射阴极针尖,其高度小于0.1mm,曲率半径在0.1~0.5μm间.再利用在钽针尖上的固-气相反应法,制得钽芯氮化钽、炭化钽和炭化氮化钽三种场发射阴极,给出了它们的场发射图象和有关场发射特性的实验数据.实验结果表明含钽化合物是一类性能良好的场发射阴极材料.

Abstract: Tantalum tips with radius 0.1-0.5μm had been prepared by electrochemical etching, and then field-emission cathodes of tantalum nitride (Ta2N) tantalum carbide (Ta C), and tantalum carbide-nitride (TaNxCy) with Ta-core were prepared by solidgas reaction on the surface of Ta tips. Typical field-emission patterns and work functions Regarding fild-emission characteristics were given. It is shown that tantalum compounds are promising materials for field emitters.