ZnO压电薄膜的多晶模型研究

应用科学学报 ›› 1986, Vol. 4 ›› Issue (4): 343-350.

ZnO压电薄膜的多晶模型研究

章晓中, 赵明洲

同济大学

收稿日期:1984-10-16 修回日期:1985-05-10 出版日期:1986-12-31 发布日期:1986-12-31

A POLYCRYSTALLINE MODEL OF THE SAW PROPERTIES OF ZnO PIEZOELECTRIC THIN FILM

ZHANG XIAOZHONG, ZHAO MINGZHOU

Tongji University

Received:1984-10-16 Revised:1985-05-10 Online:1986-12-31 Published:1986-12-31

摘要/Abstract

摘要： 本文考虑了ZnO压电薄膜的晶格畸变和多晶结构,建立了ZnO压电薄膜的多晶膜模型,计算了ZnO/K9 glass和ZnO/fused quartz的SAW速度和有效机电耦合系数,测量了ZnO/K9 glass的SAW速度v₀和v₁,结果表明:多晶模型的计算值与实验值较接近,比单晶模型的结果有明显改善.计算结果还表明:分散度σ<6°时它对ZnO膜的SAW性能影响较小,而晶格畸变对SAW性能影响较大.

Abstract: The effects of lattice distortion and structural defects of the polycrystalline film have been taken into consideration. A polycrystalline model of ZnO piezoelectric thin film has been established to calculate the SAW velocities and effective electromechanical coupling factors of ZnO-glass and ZnO-fused quartz structure. The calculated values of the polycrystalline model fit the experimental values better than that of simple crystal model. The analysis based on the polycrystalline model also show that the standard deviation of C-axis orientation has only minor influence on the SAW properties of ZnO piezoelectric film and the lattice distortion is the prime detrimental factor.

章晓中, 赵明洲. ZnO压电薄膜的多晶模型研究[J]. 应用科学学报, 1986, 4(4): 343-350.

ZHANG XIAOZHONG, ZHAO MINGZHOU. A POLYCRYSTALLINE MODEL OF THE SAW PROPERTIES OF ZnO PIEZOELECTRIC THIN FILM[J]. Journal of Applied Sciences, 1986, 4(4): 343-350.