English

应用科学学报 ›› 1988, Vol. 6 ›› Issue (3): 233-240.

• 论文 • 上一篇    下一篇

金和铂在Si-Al2O3界面的电学效应

李思渊, 殷之平, 张同军, 王毓珍, 贾笑天   

  1. 兰州大学
  • 收稿日期:1985-10-23 修回日期:1986-05-10 出版日期:1988-09-30 发布日期:1988-09-30

THE ELECTRICAL EFFECTS OF GOLD AND PLATINUM AT THE Si-Al2O3 INTERFACE

LI SIYUAN, YIN CHIPING, ZHANG TONGJUN, WANG YUZHEN, JIA XIAOTIAN   

  1. Department of Physics, Lanzhou, University
  • Received:1985-10-23 Revised:1986-05-10 Online:1988-09-30 Published:1988-09-30

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摘要： 本文系统地研究了金、铂等杂质在Si-Al2O3界面的电学特性及其热处理变化,给出了界面的电子能谱分析结果,并对Au (Pt)等杂质界面效应的作用机制进行了探讨.

Abstract: In this paper, the electrical effects of gold (Au) and platinum (Pt) at the Si-Al2O3 interface and the annealing behaviour of these effects tinder different annealing conditions are studied. The results of the photoelectron spectroscopy of the Si-Al2O3 system are presented also. Further, the action mechanism of Au and Pt at the interface is discussed.