English

应用科学学报 ›› 1988, Vol. 6 ›› Issue (4): 340-344.

• 论文 • 上一篇    下一篇

坐标变换法对Newman方程参数的确定

丘第荣1, 林应举1, 范得培1, 李李泉2   

  1. 1. 南京大学;
    2. 轻工业部电光源材料研究所
  • 收稿日期:1986-06-26 修回日期:1987-10-04 出版日期:1988-12-31 发布日期:1988-12-31

DETERMINATION OF THE PARAMETERS OF NEWMAN EQUATION BY COORDINATES TRANSFORMATION

QIU DIRONG1, LIN YINGJU1, LI LIQUAN1, FAN DEPEI2   

  1. 1. Center of Materials Analysis, Nanjing University;
    2. Department of Mathematics, Nanjing University;
    3. Research Institute of Electrical Light Source Materials, Nanjing;
    4. Department of Physics, Nanjing University
  • Received:1986-06-26 Revised:1987-10-04 Online:1988-12-31 Published:1988-12-31

PDF

90

被引次数

1

摘要： 由一次曝光得到背射赝Kossel线,然后通过坐标变换和非线性最小二乘法,可以得到Newman方程参数,从而计算出样品相应的晶面间距.本实验测量了硅单晶d{533}晶面间距,其精度可达8×10-6nm.本文讨论了背射赝Kossel一次曝光法的实验步骤及实验的主要误差来源.

Abstract: By coordinates transformation and calculation with the Least Square method, we can determine the parameters of the Newman equation which represents the back reflection pseudo-Kossel curve. From the parameters, the planar spacing d of the corresponding lattice planes can be calculated. In our experiment, the d {533} of a single crystal silicon is measured. The accuracy of measurement is about 8×10-6nm. The experimental procedures and the principal sources of error are also discussed.