English

应用科学学报 ›› 1989, Vol. 7 ›› Issue (1): 61-64.

• 论文 • 上一篇    下一篇

用直线四探针头测量金属-半导体的接触电阻率

陈存礼1, 华文玉2   

  1. 1. 南京大学;
    2. 华东工学院
  • 收稿日期:1987-05-17 修回日期:1987-09-24 出版日期:1989-03-31 发布日期:1989-03-31

THE MEASUREMENT OF SPECIFIC CONTACTRESISTANCE OF M-S BY PROBE HEADSOF THE IN-LINE FOUR PROBES

CHEN CUNLI1, HUA WENYU2   

  1. 1. Nanjing University;
    2. East China Institute of Technology
  • Received:1987-05-17 Revised:1987-09-24 Online:1989-03-31 Published:1989-03-31

PDF

123

被引次数

9

摘要： 本文提出一种用直线四探针头测量金属-半导体欧姆接触接触电阻率的简捷方法.导出了适用于薄层半导体材料的接触电阻率表达式,经实验验证结果与线性传输线模型一致.

Abstract: In this paper, a simple method to measure the specific contact resistance of metal-semiconductor ohmic contact is developed, using the probe heads of the inline four probes. The equations to measure the specific contact resistance for a thin semiconductor layer have been derived. The experimental results are in good agreement with the in-line geometry transmission line model.