掺氮吸气剂的电镜分析研究

应用科学学报 ›› 1990, Vol. 8 ›› Issue (3): 241-246.

掺氮吸气剂的电镜分析研究

邵力为¹, 陆群¹, 刘洁美¹, 胡嗣安², 况士中²

1. 东南大学;
2. 华东电子管厂

收稿日期:1988-11-10 修回日期:1989-02-19 出版日期:1990-09-30 发布日期:1990-09-30

ELECTRON MICROSCOPE ANALYSIS FOR MIXED NITROGEN GETTER

SHAO LIWEI¹, LU GUN¹, LIU JIEMEI¹, HU SIAN², KUANG SHIZHONG²

1. Southeast University;
2. Huadong Electron Tube Factory

Received:1988-11-10 Revised:1989-02-19 Online:1990-09-30 Published:1990-09-30

摘要/Abstract

摘要： 主要介绍运用扫描电子显微镜和透射电子显微镜对进口羰基Ni粉与国产羰基Ni粉及吸气剂蒸散后各部位表面形貌及组分进行分析研究,获得了羰基Ni粉质量比较的重要信息,且从物理机理上解释了产生"拱起"质量问题的缘由.本文还介绍了掺氮吸气剂蒸散后残体的X光电子能谱分析结果,从而更进一步印证和充实了上述质量问题的物理机理解释.

Abstract: We analyzed the imported carbonyl nickcl powder, the home-made carbonyl nickel powder, and the surface shape and components of every position of the getter after vaporization, using the scanning electron microscope (SEM) and the transmission electron microscope (TEM). Important data for quality contrast between the carbonyl nickel powders was got and the cause of the "arch" problem was interpretated according to physical mechanisms.
We also made an XPS analysis of the vaporized body for the mixed nitrogen getter, which further proved and substantiated the interpretation of the physical mechanisms for the quality problem.

邵力为, 陆群, 刘洁美, 胡嗣安, 况士中. 掺氮吸气剂的电镜分析研究[J]. 应用科学学报, 1990, 8(3): 241-246.

SHAO LIWEI, LU GUN, LIU JIEMEI, HU SIAN, KUANG SHIZHONG. ELECTRON MICROSCOPE ANALYSIS FOR MIXED NITROGEN GETTER[J]. Journal of Applied Sciences, 1990, 8(3): 241-246.