集成电路工艺实时统计分析方法与应用

应用科学学报 ›› 1991, Vol. 9 ›› Issue (2): 140-144.

集成电路工艺实时统计分析方法与应用

何野

东南大学

收稿日期:1990-02-09 出版日期:1991-06-30 发布日期:1991-06-30
基金资助:
国家自然科学基金资助课题

A REAL TIME STATISTICAL ANALYSIS METHODOLOGY AND APPLICATION FOR INTEGRATED CIRCUIT PROCESS

He YIE

Southeast University

Received:1990-02-09 Online:1991-06-30 Published:1991-06-30

摘要/Abstract

摘要： 与试验设计方法相结合,提出了一个用于集成电路工艺实时统计分析的方法.对CMOS和NMOS电路的实际模拟分析结果表明,利用该方法对工艺线上的芯片测量结果进行分析,能找出导致器件及电路特性分布异常的主要可能工序.

关键词: 工艺涨落, 统计分析, 集成电路工艺

Abstract: A real time statistical analysis methodology of IC manufacturing process in combination with an experimental design is presented. The modelling analysis results of the real CMOS and NMOS IC indi cate that the most possible process step which is responsible for the unusual device or circuit performance stribution can be found using the methodology to analyze the measurementl diresults obtained from chips in the process line.

Key words: integrated circuit process, process fluctuation, statistica analysis

何野. 集成电路工艺实时统计分析方法与应用[J]. 应用科学学报, 1991, 9(2): 140-144.

He YIE. A REAL TIME STATISTICAL ANALYSIS METHODOLOGY AND APPLICATION FOR INTEGRATED CIRCUIT PROCESS[J]. Journal of Applied Sciences, 1991, 9(2): 140-144.