使用单片微机的离子源弧流稳定系统

应用科学学报 ›› 1991, Vol. 9 ›› Issue (3): 215-221.

使用单片微机的离子源弧流稳定系统

翟其刚, 俞光仪, 徐林木, 陈伟民

中国科学院上海冶金研究所

收稿日期:1989-05-22 修回日期:1990-06-27 出版日期:1991-09-30 发布日期:1991-09-30

ARC CURRENT CONTROL SYSTEM OF ION SOURCE BASED ON SINGLE CHIP MICROCOMPUTER

ZHAI QIGANG, YU GUANGYI, XU LINMU, CHEN WEIMING

Shanghai Institute of Metallurgy, Academia Sinica

Received:1989-05-22 Revised:1990-06-27 Online:1991-09-30 Published:1991-09-30

摘要/Abstract

摘要： 设计和制造一套使用单片微计算机的离子源弧流稳定系统,使用光纤传递信息以使高压与低压隔离,使得在低压侧用同一系统通过切换来控制直热式和间热式离子源,使之弧流稳定.达到的弧流稳定度优于±1%(F.S.)

关键词: 单片微计算机, 离子源弧流, 信号光纤传输, 感性负载调压, 高压隔离

Abstract: A control system of arc current of ION source has been designed and constructde by using a single chip microcomputer. This system transmits the information of the ION source by optical fibers from the very high voltage side to the ground voltage side. By optical communication, the part of the control system located on the ground voltage side is insulated from the very high voltage. This control system can be used to control the arc current of two different types of ION sources:the direct heating ION source and indirect heating ION source. The stability of the arc current of the ION source using this control system is less than ±1% (F. S.).

Key words: arc current of beam of ion, insulate from high voltage, voltage regulation for inductance load, signal transmission by optical fiber, single chip microcomputer

翟其刚, 俞光仪, 徐林木, 陈伟民. 使用单片微机的离子源弧流稳定系统[J]. 应用科学学报, 1991, 9(3): 215-221.

ZHAI QIGANG, YU GUANGYI, XU LINMU, CHEN WEIMING. ARC CURRENT CONTROL SYSTEM OF ION SOURCE BASED ON SINGLE CHIP MICROCOMPUTER[J]. Journal of Applied Sciences, 1991, 9(3): 215-221.