English

应用科学学报 ›› 1991, Vol. 9 ›› Issue (3): 280-282.

• 研究简报 • 上一篇    

测量磁涂层厚度的一种准确方法

寻培珏1, 李桂新2   

  1. 1. 电子科学技术大学;
    2. 太原磁记录技术研究所
  • 收稿日期:1990-04-07 修回日期:1990-08-17 出版日期:1991-09-30 发布日期:1991-09-30

A RIGOROUS METHOD OF MAGNETIC-LAYER THICKNESS MEASUREMENT

XUN PEIJUE1, LI GUIXIN2   

  1. 1. University of Electronic Science and Technology of China;
    2. Taiyuan Institute of Magnetic Recording Technology
  • Received:1990-04-07 Revised:1990-08-17 Online:1991-09-30 Published:1991-09-30

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摘要： 为了优化软磁盘和磁带的生产工艺,我们提出用扫描电镜准确的测量磁涂层厚度.

关键词: 测量方法, 扫描电镜, 软磁盘

Abstract: In this paper, we propose a rigorous method of magnetic-layer thickness measurement by means of scanning electron microscopy (SEM). The sample manufacturing technique is introduced, and the SEM pictures of the magnetic-layer thickness of a flexible disk are given.

Key words: SEM, measurement method, flexible disk