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应用科学学报 ›› 1992, Vol. 10 ›› Issue (1): 43-48.

• 论文 • 上一篇    下一篇

单轴各向异性薄膜参数的变厚度椭偏分析方法

朱荣, 韦钰   

  1. 东南大学
  • 收稿日期:1990-10-28 修回日期:1991-03-13 出版日期:1992-03-31 发布日期:1992-03-31

A NUMERICAL INVERSE METHOD FOR DETERMINING FILM PARAMETERS OF UNIAXIAL ANISOTROPIC FILM WITH ELLIPSOMETER

ZHU KONG, WEI YU   

  1. Southeast University
  • Received:1990-10-28 Revised:1991-03-13 Online:1992-03-31 Published:1992-03-31

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摘要： 讨论了光轴垂直于薄膜界面的单轴各向异性薄膜(例如L-B膜)的椭偏参数迭代反演方法.提出用改变薄膜厚度的方法获得多组独立的椭偏方程,以便将薄膜光学常数和厚度分开计算,从而把三参数问题转化为二参数问题的椭偏参数迭代反演方法.给出了反演程序流程及应用于L-B膜的实例.

关键词: L-B膜, 薄膜厚度和折射率, 各向异性, 椭偏术

Abstract: A numerical Inversion method of ellipsometry has been developed for determining optical constants and thickness of the uniaxial anisotropio film, the optical axis of which is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometrio equations for the separate calculation of optical constants and thickness of the film, and reduce the three-parameter problem to a two-parameter one. A flow chart of the numerical inverse program is given and an example applied to L-B films is illustrated.

Key words: anisotropio ellipsometry, Inverse method, Langmuir-Blodgett film