English

应用科学学报 ›› 1992, Vol. 10 ›› Issue (4): 311-317.

• 论文 • 上一篇    下一篇

共焦激光扫描显微镜及其对集成电路的检测

张仲宁, 张淑仪, 陆悦生, 郭亮   

  1. 南京大学
  • 收稿日期:1991-04-03 修回日期:1991-10-12 出版日期:1992-12-31 发布日期:1992-12-31

CONFOCAL LASER SCANNING MICROSCOPE AND DETECTION OF INTEGRATED CIRCUITS

ZHANG ZHONGNING, ZHANG SHUYI, LIT YUESHBNG, GUO LIANG   

  1. Nanjing University
  • Received:1991-04-03 Revised:1991-10-12 Online:1992-12-31 Published:1992-12-31

PDF

88

被引次数

3

摘要： 报道了一种新型的成象检测系统——共焦激光扫描显微镜,介绍了成象原理、性能和应用范围.该显微镜利用光学共焦方法,可对样品结构实现三维分层成象或结构高度差的定量测量.与传统光学显微镜相比,具有更高的分辨率(空间分辨率优于0.2μm)和更高的对比度,同时还具有光电成象功能.文中给出了该显微镜对几种集成电路检测的结果.共焦激光扫描显微镜可作为大规模集成电路等半导体器件、材料和其它样品(如生物样品)的一种方便、有效、非接触式、非损伤性的检测系统.

关键词: 扫描显微镜, 激光, 共焦, 集成电路

Abstract: A new type of imaging detection system, confocal laser scanning microscope (OLSM), has been established, Using the optical confocal method, laminated imaging of three-dimensional reconstructions and quantitative measurements of structures with height differences can b& obtained. OLSM images, thus obtained, tend to have better resolution (spatial resolution is about 0.2/μm) and sharper contrast than those obtained with an optical microscope. Furthermore, OLSM haa the function of photoelectric imaging. The detection results of several integrated circuits are shown in this paper, which proves OLSM is a convenient, effective, noncontact and nondestructive detection system for the images and measurements of semiconductor materials and devices, as well as other samples Such as biological materials, etc.

Key words: scanning microscope, laser, confocal, integrated circuit