智能化150MHz反射式声学显微镜及声显微图像处理研究

应用科学学报 ›› 1993, Vol. 11 ›› Issue (3): 226-234.

智能化150MHz反射式声学显微镜及声显微图像处理研究

陈戈林, 胡思正, 罗淑云, 张克潜, 申忠明, 徐正元

清华大学

收稿日期:1991-04-08 修回日期:1991-11-09 出版日期:1993-09-30 发布日期:1993-09-30

THE STUDY ON A 150 MHz INTELLIGENT REFLECTION SCANNING ACOUSTIC MICROSCOPE AND ITS IMAGE PROCESSING FUNCTION

CHEN GELIN, HU SIZHENG, LUO SHUYUN, ZHANG KEQIAN, SHEN ZHONGMING, XU ZHENGYTIAN

Tsinghua University

Received:1991-04-08 Revised:1991-11-09 Online:1993-09-30 Published:1993-09-30

摘要/Abstract

摘要： 描述了研制成功的一台智能化150MHz反射式声显微镜.该机用通用微机为控制中心控制整机工作、终端显示图象;采用精心设计的声镜和电路.该机具有较高的表层和深层分辨能力,可观察出5.1mm深处,20μm宽结构的形状.该机还具有多种声显微图象处理功能,分析样品参数.因而具有较高推广应用价值.

关键词: 声图像处理, 反射式, 智能化, 声学显微镜

Abstract: Tne intelligent 150 MHz SAM is described in this paper. A current microcomputer is used as the central control part, the image being displayed on the terminal. The instrument has a high resolution on the surface and in the deep region of a structure, thus a structure of 20μm lateral dimension located at 5.1 mm from the surface can be observed. The microscope also possesses the function of image processing and of analysing specimen parameters. These facts show that the microscope is of practical value.

Key words: reflection, acoustic microscope, acoustic image processing, intelligent

陈戈林, 胡思正, 罗淑云, 张克潜, 申忠明, 徐正元. 智能化150MHz反射式声学显微镜及声显微图像处理研究[J]. 应用科学学报, 1993, 11(3): 226-234.

CHEN GELIN, HU SIZHENG, LUO SHUYUN, ZHANG KEQIAN, SHEN ZHONGMING, XU ZHENGYTIAN. THE STUDY ON A 150 MHz INTELLIGENT REFLECTION SCANNING ACOUSTIC MICROSCOPE AND ITS IMAGE PROCESSING FUNCTION[J]. Journal of Applied Sciences, 1993, 11(3): 226-234.