微齿轮加工工艺研究

应用科学学报 ›› 1993, Vol. 11 ›› Issue (4): 360-365.

微齿轮加工工艺研究

赵新安, 苏毅, 张熙, 谭淞生, 王渭源

中国科学院上海冶金研究所

收稿日期:1991-12-19 修回日期:1992-09-27 出版日期:1993-12-31 发布日期:1993-12-31

INVESTIGATION ON PREPARATION OF SUB-MILLIMETER POLY-SILICON GEAR

ZHAO XINAN, SU YI, ZHANG XI, TAN SONGSHENG, WANG WEIYUAN

Shanghai Institute of Metallurgy, Academia Sinica

Received:1991-12-19 Revised:1992-09-27 Online:1993-12-31 Published:1993-12-31

摘要/Abstract

摘要： 微机械加工技术是在IC平面工艺结合牺牲层腐蚀工艺基础上发展和形成的.在八十年代中应用了这种准三维加工技术,出现了尺寸在几十到几百微米的微型传感器.

关键词: 微机械加工技术, 微齿轮, 等离子腐蚀, 集成电路平面工艺

Abstract: A poly-silicon micro-gear of 400μm in diameter and 5μm in thickness with a gap of 3.5μm between the gear and the shaft has been successfully fabricated by using 10 planar technology. A gear train of the same size is also given. And the influences of plasma etching conditions on the technology are discussed.

Key words: IC planar technology, micro-gear, plasma, etching, micro-machining technology

赵新安, 苏毅, 张熙, 谭淞生, 王渭源. 微齿轮加工工艺研究[J]. 应用科学学报, 1993, 11(4): 360-365.

ZHAO XINAN, SU YI, ZHANG XI, TAN SONGSHENG, WANG WEIYUAN. INVESTIGATION ON PREPARATION OF SUB-MILLIMETER POLY-SILICON GEAR[J]. Journal of Applied Sciences, 1993, 11(4): 360-365.