压电晶体双晶片汞传感器

应用科学学报 ›› 1994, Vol. 12 ›› Issue (1): 53-56.

压电晶体双晶片汞传感器

李光云, 陆新根, 王科峰, 杜根娣

中科院上海冶金研究所

收稿日期:1991-10-28 修回日期:1992-12-25 出版日期:1994-03-31 发布日期:1994-03-31

MERCURY SENSOR WITH BI-WAFER OF PIEZOELECTRIC CRUSTAL

LI GUANGYUN, LU XINGEN, WANG KEFENG, DU GENDI

Shanghai Institute of Metallurgy, Academia Sinica

Received:1991-10-28 Revised:1992-12-25 Online:1994-03-31 Published:1994-03-31

摘要/Abstract

摘要： 设计了新型的压电晶体传感器探头,使参考晶片与传感晶片同时直接接触待测气体.试验了使用该结构的压电晶体双晶片汞传感器的测汞性能和对水份干扰的影响.实验结果表明:在相当大的范围内.参考晶片接触待测气体并不影响传感器对汞蒸汽的探测,而且还减少了水份等气氛的干扰.

关键词: 压电晶体, 汞传感器, 参考晶片, 传感晶片

Abstract: A new type of piezoelectric crystal sensor detector is designed. The reference wafer and the sensitive wafer are in touch with the detected gases directly at the same time. The mercury vapor response and the interference influence of moisture are tested using the piezoelectric crystal mercury sensor with a double wafer.Results show that in a wide range mercury vapor detection is not influenced by the sensor,when the reference wafer touches the detected gases. Moreover the interference of moisture or any other gas can be greatly decreased.

Key words: piezoelectric crystal, sensitive water, reference wafer, mercury sensor

李光云, 陆新根, 王科峰, 杜根娣. 压电晶体双晶片汞传感器[J]. 应用科学学报, 1994, 12(1): 53-56.

LI GUANGYUN, LU XINGEN, WANG KEFENG, DU GENDI. MERCURY SENSOR WITH BI-WAFER OF PIEZOELECTRIC CRUSTAL[J]. Journal of Applied Sciences, 1994, 12(1): 53-56.