宽范围挠性支承精密调焦系统的设计研究

应用科学学报 ›› 1994, Vol. 12 ›› Issue (2): 159-164.

宽范围挠性支承精密调焦系统的设计研究

朱峰, 张鸿海, 黄奇葵, 陈日曜

华中理工大学

收稿日期:1992-06-29 修回日期:1993-05-23 出版日期:1994-06-30 发布日期:1994-06-30
基金资助:
国家自然科学基金项目,国家教委博士点基金

STUDY AND DESIGN OF FLEXURE HINGE PRECISE POSITIONING SYSTEM HAVING RELATIVE WIDE RANGE

ZHU FENG, ZHANG HONGHAI, CHEN RIYAO, HUANG QIKUI

Huazhong University of Science and Technology

Received:1992-06-29 Revised:1993-05-23 Online:1994-06-30 Published:1994-06-30

摘要/Abstract

摘要： 对宽范围挠性支承精密调焦系统进行了设计研究,给出了挠性支承的设计计算方法及公式,设计了两级杠杆放大式挠性支承机构及相应的驱动控制部分,试验证明,所研制的系统具有180μm的运动范围,系统分辨率优于0.5μm。还对电致伸缩微位移器在挠性支承机构中的驱动特性进行了试验研究。

关键词: 挠性支承, 精密定位, 杠杆放大

Abstract: In this paper,the design of the flexure hinge positioning system having a relative wide range is studied.The paper gives the calculation and formulas for designing the flexure hinge. The flexure hinge mechanism amplified by a two step lever is achieved. It is shown by experimental results that the resolution of the precise positioning system is higher than 0.5μm and that the adjusting range is 180μm,In addition,the paper also discusses the driving property of a piezo-electric actuator used in the flexure hinge machanism.

Key words: lever amplification, flexure hinge, precise positioning

朱峰, 张鸿海, 黄奇葵, 陈日曜. 宽范围挠性支承精密调焦系统的设计研究[J]. 应用科学学报, 1994, 12(2): 159-164.

ZHU FENG, ZHANG HONGHAI, CHEN RIYAO, HUANG QIKUI. STUDY AND DESIGN OF FLEXURE HINGE PRECISE POSITIONING SYSTEM HAVING RELATIVE WIDE RANGE[J]. Journal of Applied Sciences, 1994, 12(2): 159-164.