MPCVD法沉积金刚石薄膜中等离子体光谱

应用科学学报 ›› 1995, Vol. 13 ›› Issue (1): 35-38.

MPCVD法沉积金刚石薄膜中等离子体光谱

周明华, 夏义本, 张虚白, 王鸿

上海大学嘉定校区

收稿日期:1992-12-28 修回日期:1993-06-18 出版日期:1995-03-31 发布日期:1995-03-31

AN INVESTIGATION OF PLASMA SPECTRUM IN THE PROCESS OF DIAMOND THIN FILM DEPOSITED BY MPCVD

ZHOU MINGHUA, XI YIBEN, ZHANG XUBAI, WANG HONG

Shanghai University Jiading Campus

Received:1992-12-28 Revised:1993-06-18 Online:1995-03-31 Published:1995-03-31

摘要/Abstract

摘要： 从等离子体发射光谱变化这一角度研究在不同沉积条件下等离子体中电子平均能量的特点,分析碳源气体分子与电子的碰撞以及碳氢基团的能态变化,从而对等离子体法沉积金刚石薄膜微观机理进行初步的探索。

关键词: 电子平均动能, 金刚石薄膜, 等离子体光谱

Abstract: The character of the average energy of the electrons in the plasma ball generated by microwaves is studied by observing the spectrum of the plasma ball under different depositing conditions.The mechanism of deposition is discussed by analyzing the collisions between electrons and hydrocarbon molecules and the change of the hydrocarbon radicals' energy.

Key words: average energy of electrons, diamond film plasma spectrum

周明华, 夏义本, 张虚白, 王鸿. MPCVD法沉积金刚石薄膜中等离子体光谱[J]. 应用科学学报, 1995, 13(1): 35-38.

ZHOU MINGHUA, XI YIBEN, ZHANG XUBAI, WANG HONG. AN INVESTIGATION OF PLASMA SPECTRUM IN THE PROCESS OF DIAMOND THIN FILM DEPOSITED BY MPCVD[J]. Journal of Applied Sciences, 1995, 13(1): 35-38.

[1]	居建华, 夏义本, 张伟丽, 王林军, 史为民, 黄志明, 李志锋, 郑国珍, 汤定元. 掺氮类金刚石薄膜的微观结构和红外光学性能研究[J]. 应用科学学报, 2001, 19(2): 173-177.
[2]	朱纪军, 陆祖宏, 仲昕, 左敦稳, 王珉. 类金刚石薄膜的喇曼光谱高斯分解研究[J]. 应用科学学报, 2000, 18(1): 47-50.
[3]	屠宇强, 夏义本, 王鸿. Si衬底上金刚石薄膜的成核和生长机理[J]. 应用科学学报, 1993, 11(3): 258-264.
[4]	安其霖, 夏义本, 居建华, 史伟民, 王鸿. 硅太阳电池类金刚石增透膜的研制[J]. 应用科学学报, 1993, 11(1): 1-4.