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应用科学学报 ›› 1995, Vol. 13 ›› Issue (2): 174-178.

• 论文 • 上一篇    下一篇

光谱连续的脉冲真空紫外(VUV)辐射源研究

周小勇, 朱绍龙   

  1. 复旦大学
  • 收稿日期:1993-07-03 修回日期:1993-11-03 出版日期:1995-06-30 发布日期:1995-06-30

STUDIES OF THE PULSED VUV RADIATION SOURCES WITH CONTINUOUS SPECTRUM

ZHOU XIAOYONG, ZHU SHAOLONG   

  1. Fudan University
  • Received:1993-07-03 Revised:1993-11-03 Online:1995-06-30 Published:1995-06-30

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摘要： 报道了一种光谱连续的真空紫外辐射源的设计和特性研究。为提高其辐射强度,辐射源设计在高气压、短脉冲状态工作。实验测得当充氢0.2~0.9MPa、极距0.4~0.8mm时,辐射源击穿电压为4~10kV,脉冲宽度1.2~2.2×10-7s.与充氢压强、极间距有关,用Meek的击穿判据,理论计算了击穿电压,用放电通道膨胀理论,计算了放电脉冲宽度,发现两者都与实验基本相符。真空紫外辐射源的轴向光谱辐亮度,用一事先标定好的真空紫外光谱探测系统测量,其连续光谱辐射主要在140~160nm和175~200nm两个区间,来源于氢分子辐射,其最大积分轴向辐亮度可达11mW/Sr·cm2。

关键词: 光谱, 光辐射, 光源, 真空紫外

Abstract: The design and the investigations of a new vacunm ultraviolet (VUV) radiation source with continuous spectrum are presented.For enhancing the continuous spectrum intensity,the VUV source is designed to work under conditions of high pressure (0.2~0.9MPa) and short pulses.It is found from experiments that the breakdown voltage of the VUV source with a filling gas of hydrogen id about 8×103 V and the pulse width 1×10-7 sec,depending on the filling gas pressure and the electrode separation. The breakdown voltage is also theoretically calculated by the Meek breakdown criterion,and the pulse width by the discharge channel expansion theory,It is found that both are in reasonable agreement with the experimental results.

Key words: vacuum ultraviolet (VUV), light sources, spectrum, light radiation