扫描探针检测交变力场

应用科学学报 ›› 1995, Vol. 13 ›› Issue (4): 387-392.

扫描探针检测交变力场

张杰, 王兆球, 张淑仪

南京大学

收稿日期:1993-11-19 修回日期:1994-07-20 出版日期:1995-12-31 发布日期:1995-12-31

THE MEASUREMENT OF AC FORCES BY SCNNING PROBE SYSTEM

ZHANG JIE, WANG ZHAOQWIU, ZHANG SHUYI

Nanjing University

Received:1993-11-19 Revised:1994-07-20 Online:1995-12-31 Published:1995-12-31

摘要/Abstract

摘要： 设计了一个可检测交变力场的扫描探针系统。针尖受到与样品间的交变电场力或磁场力的作用而振动,针尖振动由一超外差激光干涉仪检测,从而确定作用力的大小。该文分析了系统的灵敏度,测量了针尖与样品间的交变电场力随两者间距的变化曲线,对周期性分布的电场进行了一维扫描检测,井进行了金属薄膜厚度的测量,该文还利用磁性探针进行了交变磁场力的检测,系统的电磁力检测灵敏度为10^-11N.

关键词: 扫描探针, 超外差激光干涉仪, 交变力

Abstract: A method of measuring an ac force by a scanning probe system is proposed.The lever of the system is driven by the ac force between the sample and the tip of the lever,so that the ac force can be determined by the amplitude of the vibration of the lever,which is measured by a heterodyne laser interferometer. The variation of the force with the distance between the sample and the tip,and the electric and magnetic fields are deteeted.The thickness of thin films is measured,The force detection sensitivity is also discussed and is estimated to be about 10^-11 N.

Key words: scanning peobe, ac force, heteodyne laser interferometer

张杰, 王兆球, 张淑仪. 扫描探针检测交变力场[J]. 应用科学学报, 1995, 13(4): 387-392.

ZHANG JIE, WANG ZHAOQWIU, ZHANG SHUYI. THE MEASUREMENT OF AC FORCES BY SCNNING PROBE SYSTEM[J]. Journal of Applied Sciences, 1995, 13(4): 387-392.