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应用科学学报 ›› 1995, Vol. 13 ›› Issue (4): 400-404.

• 论文 • 上一篇    下一篇

LaAlO3单晶片立方度的非对称X射线衍射测定

郝建民, 温业礼, 张世敏   

  1. 电子工业部第四十六研究所
  • 收稿日期:1993-12-20 修回日期:1994-05-17 出版日期:1995-12-31 发布日期:1995-12-31

THE DETERMINATION OF CUBIC DEGREES IN LaAlO3 SINGLE CRYSTAL WAFER WITH ASYMETRICAL X-RAY DIFFRACTION TECHNOLOGY

HAO JIANMIN, WEN YELI, ZHANG SHIMIN   

  1. Tianjin Electronic Materials Research Institute
  • Received:1993-12-20 Revised:1994-05-17 Online:1995-12-31 Published:1995-12-31

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摘要： 该文分析了LaAlO3单晶片由于准立方晶系{hkl}cX射线衍射峰的劈裂情况,发现{hol}c峰的劈裂情况较简单。用非对称X射线衍射技术测量了(ool)c切向晶片{hol}c峰的劈裂角距离,建立了该角距离与LaAlO3三方晶系晶胞参数α的关系,实现了LaAlO3单晶片立方度的无损测量。为研究生长、热处理过程中高温超导YBCO膜与衬底缺陷的相互关系打下基础。

关键词: X射线非对称衍射, LaAlO3衬底, 结构参数

Abstract: The{hkl}c X-ray diffraction peaks splitting due to the pseudocubic system in the LaAlO3 single crystal wafer has been analyzed.It is found that the splitting for{hol}c is simpler than that for other peaks.The splitting angle for {hol}c is measured for a (ool)c LaAlO3 sample by the asymmetrical θ~2θ X-ray diffraction technology.The relation between the splitting angle and the rhombohedral lattice constant a in LaAlO3 is established.The cubic degrees of an LaAlO3substrate containing YBCO film is measured,with no destruction to the film and the substrate.The experimental technology here is very suitabler for researching the defect relation between the film and the substrate in the process of growing and annealing.

Key words: LaAlO3 substrate, stauctural Parameter, asymmetrical X-ray diffraction