朗谬尔探针用于VAC等离子体诊断的初步研究

应用科学学报 ›› 1996, Vol. 14 ›› Issue (4): 475-480.

朗谬尔探针用于VAC等离子体诊断的初步研究

程仲元, 邹积岩, 杨磊, 张汉明

华中理工大学

收稿日期:1995-01-02 修回日期:1995-10-13 出版日期:1996-12-31 发布日期:1996-12-31
作者简介:程仲元:博士后,华中理工大学电力系,武汉 430074

LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES

OHENG ZHONGYUAN, ZOU JIYAN, YANG LEI, ZHANG HANMING

Huazhong University of Science and Technology

Received:1995-01-02 Revised:1995-10-13 Online:1996-12-31 Published:1996-12-31

摘要/Abstract

摘要： 简要分析了朗谬尔(Langmuir)探针用于真空电弧镀膜(VAC)等离子体诊断的可行性及理论适用性问题.介绍了一种可用于VAC等离子体在线监测的探针诊断系统,并利用此系统分析了不同工艺参数下等离子体参数的变化.

关键词: 等离子体诊断, 真空电弧镀膜, 朗谬尔探针

Abstract: This paper discusses the feasibility of using the Langmuir probe as a diagnostic tool for plasma in Vacuum Arc Coating (VAC) processes, and the validity of probe theories in this situation. A system has been set up for the in situ diagnosis of VAC plasma. Plasma parameters have been diagnosed nuder various process parameters.

Key words: Langmuir probe, vacuum are coating, plasma diagnosis

程仲元, 邹积岩, 杨磊, 张汉明. 朗谬尔探针用于VAC等离子体诊断的初步研究[J]. 应用科学学报, 1996, 14(4): 475-480.

OHENG ZHONGYUAN, ZOU JIYAN, YANG LEI, ZHANG HANMING. LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES[J]. Journal of Applied Sciences, 1996, 14(4): 475-480.