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应用科学学报 ›› 1997, Vol. 15 ›› Issue (1): 112-116.

• 论文 • 上一篇    下一篇

水热合成BaTiO3薄膜及其微观结构分析

许华平1, 辛火平1, 林成鲁1, 江富民2, 殷庆瑞2, 孟繁德3   

  1. 1. 中国科学院上海冶金研究所信息功能材料国家重点实验室;
    2. 中国科学院上海硅酸盐研究所无机功能材料开放实验室;
    3. 上海钢铁研究所
  • 收稿日期:1995-03-07 修回日期:1995-06-28 出版日期:1997-03-31 发布日期:1997-03-31
  • 作者简介:许华平:博士,中国科学院上海冶金研究所信息功能材料国家重点实验室,上海 200050

HYDROTHERMAL BaTiO3 THIN FILM AND ITS MICROSTRUCTURE ANALYSES

XU HUAPING1, XIN HUOPLNG1, LIN CHENGLU1, JIANG FUMING2, YIN QINGRUI2, MENG FANDE3   

  1. 1. State Key Laboratory of Functional Materials for Lnformatics Shanghai Institute of Metallurgy, Shanghai 200050;
    2. Laboratory of Inorganic Functional Materials Shanghai Institute of Ceramics, Shanghai 200050;
    3. Shanghai Institute of Iron and Steels, Shanghai 200409
  • Received:1995-03-07 Revised:1995-06-28 Online:1997-03-31 Published:1997-03-31

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摘要： 利用水热反应,成功地在160℃的低温下,直接在蒸钛硅衬底表面合成了多晶BaTiO3薄膜。扫描电镜(SEM)观察发现薄膜的组织结构均匀、致密、平均晶粒尺寸约100nm.对比快速热退火(RTA)前后薄膜的扩展电阻深度分布、SEM形貌象和X射线衍射(XRD)谱发现:薄膜吕多层结构,退火前为立方BaTiO3/非晶BaTiO3-x/T/Si.退火后变为四方BaTiO3/Ti/Si。

关键词: 水热法, BaTiO3薄膜, 微观结构, 水合薄膜

Abstract: Polycrystalline BaTiO3 thin film has been synthesized on Ti-covered silicon substrate at low temperature of 160℃ by hydrothermal method. lts micr-ostructure was dense and homogeneous, with average grain size of about 100 nm by scanning electron microscopic (SEM) observations. It can be found that a multi-laver sructure has, been formed according to the comparisons on X-ray diffraction. (XRD) patterns, SEM morphologies and spread resitance profiles of the samples before and after rapid thermal annealing. And the multilayer structure of cubic BaTiO3 (a-BT)/amorphous BaTiOx (a-BT)/TIOx/Ti/Si has evolved into tetragonal BaTiO3/TiOx/Ti/TiSi/Si after annealing.

Key words: hydrothermal method, hydrothermal thin film, BaTiO3 thin film, microstructure