新型微流通池pH-ISFET集成传感器的研制

应用科学学报 ›› 1997, Vol. 15 ›› Issue (1): 75-81.

新型微流通池pH-ISFET集成传感器的研制

牛蒙年, 丁辛芳

东南大学

收稿日期:1995-03-22 修回日期:1995-09-15 出版日期:1997-03-31 发布日期:1997-03-31
作者简介:牛蒙年:博士后,现在中科院上海冶金所传感技术国家重点实验室,上海 200050

DEVELOPMENT OF A NOVEL MICRO FLOW-THROUGH CELL Ph-ISFET INTEGRATED SENSOR

NIU NENGNIAN, DING XINFNG

Southeast University, Microelectronics Center, Nanjing 210096

Received:1995-03-22 Revised:1995-09-15 Online:1997-03-31 Published:1997-03-31

摘要/Abstract

摘要： 报道了一种新型微流通池pE-ISFET集成传感器,该集成传感器采用常规IC工艺、微加工技术和键合技术,实现微流通池、四对长臂式ISFET/REFET传感器(差分测量用)和Ti/Au膜伪参考电极芯片一体化结构,芯片面积为8mm×6mm,微流通池体积为0.7mm×5.0mm×0.3mm,当集成传感器外部配上蠕动泵、注入阀和测量电路则构成微流通池pH-ISFET流动注入分析(FIA)系统。实验结果表明,该集成传感器和FIA系统具有响应快、耗样液量少等特点,且稳定性和可靠性大为提高。

关键词: Ti/Au, 伪参考电极, 结构FIA系统, 辙流通池, pH-ISFET, 集成传感器, ISFET/REFET

Abstract: Based on the normal IC process, micro machining technology and bonding technology, a novel micro flow-through cell pH-ISFET integrated sensor has been developed, which comprises micro flowthrough cell, four pair long-armed ISFET/REFET sensor (differential measurement) and Ti/Au film pseudo-reference electrode. The chip area and micro flow-through cell's Volumeare 8×6mm² and 0.7×5.0×0.3mm³, respectively. The integrated sensor together with extra peristaltic pump, injection valve and measurement circuits consists of micro flow-through cell pH-ISFET FIA (flow-injection analysis) system,Experimental results show that the integrated sensor and FIA system have fast response, small sample consumption, and other features and its stability and reliability are also ameliorated.

Key words: pH-ISFET integrated sensor, micro flow-through cell, Ti/Au film pseudo-reference electrode, ISFET/REFET structure, FIA system

牛蒙年, 丁辛芳. 新型微流通池pH-ISFET集成传感器的研制[J]. 应用科学学报, 1997, 15(1): 75-81.

NIU NENGNIAN, DING XINFNG. DEVELOPMENT OF A NOVEL MICRO FLOW-THROUGH CELL Ph-ISFET INTEGRATED SENSOR[J]. Journal of Applied Sciences, 1997, 15(1): 75-81.