新型T形边缘场致发射器件的静电分析

应用科学学报 ›› 1998, Vol. 16 ›› Issue (3): 313-319.

新型T形边缘场致发射器件的静电分析

汪琛, 赵宏卫, 尹涵春, 王保平, 童林夙

东南大学

收稿日期:1997-05-23 修回日期:1997-10-16 出版日期:1998-09-30 发布日期:1998-09-30
作者简介:汪琛:博士,东南大学电子工程系,南京 210096

Electrostatic Analysis of the Newly Fabricated T -Shaped Disk-Edge Field Emitter Arrays

WANG CHEN, ZHAO HONGWEI, YIN HANCHUN, WANG BAOPING, TONG LINSU

Southeast University, Electronics Research Institute, Nanjing 210096

Received:1997-05-23 Revised:1997-10-16 Online:1998-09-30 Published:1998-09-30

摘要/Abstract

摘要： 对一种新型T形边缘场致发射体进行了静电分析,给出了一个三极管单元的数值计算结果.在静电场的计算中采用了一种新的数值方法——非正交有限差分算法,由于所取坐标轴与边界重合,所以该方法能有效地处理任意形状的场致发射体.文中给出了场强及发射电流与几何结构因子的关系曲线、轨迹图及I-V特性曲线,并对制备提出了一些参考意见.

关键词: 静电分析, 有限差分算法, 非正交曲线坐标系, 坐标变换技术, 边缘场致发射体

Abstract: A newly fabricated T-shaped disk-edge field emitter is considered in this paper. Numerical results are presented for a unit cell, consisting of emitter, gate, and anode. A new algorithm, the finite-difference method in a non-orthogonal curvilinear coordinate system (FDM-NOCCS), is used for the calculation of electrostatic field. With the boundary-conforming coordinate lines, this method can deal with microemitter with various shapes efficiently. The dependence of electric field intensity and emitted current upon geometrical factors, the sketch of electron traces and I-V characteristics are presented. Several suggestions are given for the geometry determination of the triode in fabrication.

Key words: electrostatic analysis, disk-edge field emitter, finite-difference method, non-orthogonal curvilinear coordinate system, coordinate transformation technique

汪琛, 赵宏卫, 尹涵春, 王保平, 童林夙. 新型T形边缘场致发射器件的静电分析[J]. 应用科学学报, 1998, 16(3): 313-319.

WANG CHEN, ZHAO HONGWEI, YIN HANCHUN, WANG BAOPING, TONG LINSU. Electrostatic Analysis of the Newly Fabricated T -Shaped Disk-Edge Field Emitter Arrays[J]. Journal of Applied Sciences, 1998, 16(3): 313-319.