双层辉光离子渗金属技术等离子体诊断初探

应用科学学报 ›› 1999, Vol. 17 ›› Issue (2): 232-236.

双层辉光离子渗金属技术等离子体诊断初探

李成明¹, 徐重¹, 田林海¹, 王建明¹, 苏永安¹, 谢锡善², 董建新²

1. 太原理工大学;
2. 北京科技大学

收稿日期:1998-03-04 修回日期:1998-05-26 出版日期:1999-06-30 发布日期:1999-06-30

Study on Plasma Diagnostics of Double -Glow Plasma Surface Alloying Technique

LI CHENGMING¹, XU ZHONG¹, TIAN LINHAI¹, WANG JIANMING¹, SU YONGAN¹, XIE XISHAN², DONG JIANXIN²

1. Research Institute of Surface Engineering, Taiyuan 030024;
2. Beijing University of Science and Technology, Beijing 100083

Received:1998-03-04 Revised:1998-05-26 Online:1999-06-30 Published:1999-06-30

摘要/Abstract

摘要： 利用朗谬尔静电探针技术对双层辉光离子渗金属的等离子体参数进行了初步诊断.结果表明,等离子体电位和电子温度随气压的升高平缓下降,而等离子体密度则随气压的增加而提高,等离子体电位和电子温度均随源极电压和工件阴极电压的增加而降低.在适当的工艺条件下,源极和阴极之间产生了不等电位空心阴极效应,等离子体密度从10¹⁰数量级增加到10¹²cm^-3.

关键词: 等离子体诊断, 等离子体参数, 朗谬尔静电探针

Abstract: Langmuir probe technique is used for the plasma diagnostics of double glow plasma surface alloying technique. It has been shown that the plasma potential and the electron temperature decrease and the plasma density increase, with the rise of the gas pressure and the source electrode voltage and substrate cathode voltage. Under suitable processes condition, the unequal potential hollow cathode effect is produced between the source electrode and substrate cathode. The plasma density is increased apparently from 10¹⁰ to 10¹² cm^-3.

Key words: langmuir probe, plasma parameter, plasma diagnostics

李成明, 徐重, 田林海, 王建明, 苏永安, 谢锡善, 董建新. 双层辉光离子渗金属技术等离子体诊断初探[J]. 应用科学学报, 1999, 17(2): 232-236.

LI CHENGMING, XU ZHONG, TIAN LINHAI, WANG JIANMING, SU YONGAN, XIE XISHAN, DONG JIANXIN. Study on Plasma Diagnostics of Double -Glow Plasma Surface Alloying Technique[J]. Journal of Applied Sciences, 1999, 17(2): 232-236.