Gauss权重法求解半导体电磁测量中的一个对偶积分方程组

应用科学学报 ›› 1999, Vol. 17 ›› Issue (3): 321-326.

Gauss权重法求解半导体电磁测量中的一个对偶积分方程组

刘弋, 马桂存, 马永利, 戴显熹

复旦大学

收稿日期:1997-10-31 修回日期:1998-10-30 出版日期:1999-09-30 发布日期:1999-09-30
基金资助:
国家自然科学基金和原国家教委博士点专项科研基金资助项目

The Solution of a Dual Integral Equation System with the Method of Gaussian Integration

LIU YI, MA GUICUN, MA YONGLI, DAI XIANXI

Department of Physics, Fudan University, Shanghai 200433

Received:1997-10-31 Revised:1998-10-30 Online:1999-09-30 Published:1999-09-30

摘要/Abstract

摘要： 对一个半导体电磁测量中的对偶积分方程组运用Schlömilch定理及适当积分变换,使其降维和退耦.首次设计振荡集中抑制法导出该积分核的快收敛表式,从而成功地实现Gauss权重法对积分方程的快速精密求解,并获得了校正曲线的精密计算.强调了发挥Gauss权重法在求解积分方程中优势的关键在于获得计算非初等积分核的适当表式.

关键词: 对偶积分方程组, Gauss积分法, 电阻率测量

Abstract: A dual integral equation system was decoupled and its dimensions were reduced by means of integral transformations and Schlömilch theorem in this paper. A formula for the integral kernel was found by "depressing oscillations in a narrow interval". Based on this formula, the high accurate solution of the integral equation was obtained by Gaussian integration method. And the correction function and curves were obtained with high-accuracy. It is emphasized that Gaussian integration will be very powerful in solving integral equation if one can get a suitable formula for calculating its non-elementary integral kernal.

Key words: Gaussintegration, measurement of resistivity, dualintegral equation system

刘弋, 马桂存, 马永利, 戴显熹. Gauss权重法求解半导体电磁测量中的一个对偶积分方程组[J]. 应用科学学报, 1999, 17(3): 321-326.

LIU YI, MA GUICUN, MA YONGLI, DAI XIANXI. The Solution of a Dual Integral Equation System with the Method of Gaussian Integration[J]. Journal of Applied Sciences, 1999, 17(3): 321-326.