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应用科学学报 ›› 2000, Vol. 18 ›› Issue (1): 47-50.

• 论文 • 上一篇    下一篇

类金刚石薄膜的喇曼光谱高斯分解研究

朱纪军1, 陆祖宏1, 仲昕2, 左敦稳2, 王珉2   

  1. 1. 东南大学生物医学工程系, 江苏南京 210096;
    2. 南京航空航天大学机电工程学院, 江苏南京 210016
  • 收稿日期:1998-10-13 修回日期:1999-01-12 出版日期:2000-03-31 发布日期:2000-03-31
  • 作者简介:朱纪军(1970-),男,江苏泰兴人,博士后.

Research on Gauss Devolution of Raman Spectrum of Diamond Like Carbon Thin Film

ZHU Ji-jun1, LU Zu-hong1, ZHONG Xin2, ZUO Dun-wen2, WANG Min2   

  1. 1. Department of Biomedical Engineering, Southeast University, Nanjing 210096, China;
    2. Institute of Mechanical Engineering, NUAA, Nanjing 210016, China
  • Received:1998-10-13 Revised:1999-01-12 Online:2000-03-31 Published:2000-03-31

PDF

70

被引次数

6

摘要： 采用过滤式阴极电弧沉积的方法获得类金刚石薄膜.喇曼光谱的分析表明,这种薄膜是典型的无氢类金刚石薄膜.喇曼光谱的高斯分解研究表明:随着偏压的增加,D线和G线的位置_d、_g向低频移动,半高宽Fg减小、Fd增加,在偏压为-100V时,D线和G线强度比Id/Ig有最大值.

关键词: 喇曼光谱, 类金刚石薄膜, 过滤式阴极电弧沉积

Abstract: The diamond-like carbonfilm is achieved by filtered cathode arc deposition. The results of Raman spectrum tests show that this kind of diamond-like carbon film is a typical nonhydrogen diamond-like carbon film. The Gauss devolution algorithm is studied in this paper and the results show:the position of D line and G line increase with the increasing of applied voltage. The intensity ratio of Id/Ig has the highest value on the bias voltage of -100V.

Key words: filtered cathode arc deposition, Raman spectrum, diamond-like carbon film

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