弹性导轨在6自由度微动工作台中的应用

应用科学学报 ›› 2003, Vol. 21 ›› Issue (3): 322-323.

弹性导轨在6自由度微动工作台中的应用

黄其圣, 余晓芬, 王永红

合肥工业大学仪器仪表学院安徽合肥 230009

收稿日期:2002-09-11 修回日期:2002-11-18 出版日期:2003-09-10 发布日期:2003-09-10
作者简介:黄其圣(1940-),男,上海人,教授.
基金资助:
国家自然科学基金资助项目(50175024)

Application of the Elastic Guide in Micro Displacement Worktable with Six Degrees of Freedom

HUANG Qi-sheng, YU Xiao-fen, WANG Yong-hong

School of Instrument science, Hefei University of Technology, Hefei 230009, China

Received:2002-09-11 Revised:2002-11-18 Online:2003-09-10 Published:2003-09-10

摘要/Abstract

摘要： 介绍了6自由度微动工作台的原理、结构、设计计算方法,弹性导轨及柔性铰链在微动工作台中的应用.这种形式的微动工作台结构简单紧凑,可以避免工作台在各运动方向之间的相互干扰,使微动工作台具有很高的运动精度.

关键词: 微动工作台, 弹性导轨, 6自由度, 柔性铰链

Abstract: This paper presents the structure, the principle and the designing and calculation method of the micro displacement worktable which has six degrees of freedom. The application of elastic guide and flexible hinge in the micro displacement worktable is described. This type of micro displacement worktable is not only simple in structure but also easy in manufacture. Syn-chronously, the jam caused by the different moving directions of the worktable is avoidable. Therefore, high displacement accuracy can be obtained.

Key words: six degrees of freedom, elastic guide, micro displacement worktable, flexible hinge

中图分类号:

黄其圣, 余晓芬, 王永红. 弹性导轨在6自由度微动工作台中的应用[J]. 应用科学学报, 2003, 21(3): 322-323.

HUANG Qi-sheng, YU Xiao-fen, WANG Yong-hong. Application of the Elastic Guide in Micro Displacement Worktable with Six Degrees of Freedom[J]. Journal of Applied Sciences, 2003, 21(3): 322-323.