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应用科学学报 ›› 2004, Vol. 22 ›› Issue (2): 187-190.

• 论文 • 上一篇    下一篇

高精度非扫描三维光聚焦探测系统的研究

王永红, 余晓芬, 俞建卫, 黄其圣, 徐科军   

  1. 合肥工业大学仪器仪表学院 安徽合肥 230009
  • 收稿日期:2002-11-28 修回日期:2003-05-07 出版日期:2004-06-30 发布日期:2004-06-30
  • 作者简介:王永红(1972-),男,安徽合肥人,讲师;余晓芬(1954-),女,安徽合肥人,教授,博导.
  • 基金资助:
    国家自然科学基金(50175024);教育部科学技术研究重点(重点01103);合肥工大科研发展基金(030101F)资助项目

A Research on a Non-scanning 3-D Profile Optical Focus Detecting System

WANG Yong-hong, YU Xiao-fen, YU Jian-wei, HUANG Qi-sheng, XU Ke-jun   

  1. School of Instrumentation, Hefei University of Technology, Hefei 230009, China
  • Received:2002-11-28 Revised:2003-05-07 Online:2004-06-30 Published:2004-06-30

PDF

98

被引次数

19

摘要： 研制了一种基于像散法的非扫描三维探测系统,该检测系统利用微光学器件产生的二维点光源阵列实现并行像散光路,实现了对测量表面的全场同步检测.通过使用像散光斑光强差动算法,有效抑制光源的噪声和漂移对测量结果的影响,可以在较大采样间距下获得较高的轴向分辨率,有效解决了测量分辨率和测量速度之间的矛盾.介绍了非扫描三维检测系统的构成和三维轮廓提取方法,并给出了初步实验结果.

关键词: 三维形貌, 像散, 并行检测, 微透镜阵列

Abstract: A non-scanning 3-D profile detecting system based on astigmatic method is developed. In this detecting system, a 2-D light source array produced by a micro-optic component is used to form a parallel micro-astigmatism system. The whole-field detection of measuring plane is realized simultaneously. As the differential arithmetic of facula intensity is used, the noise and the shift of light source can be restrained effectively and the high axial resolution is achieved at a larger sampling interval. The measuring efficiency and accuracy are increased simultaneously. The construction and working principle of the no-scanning 3-D detecting system is studied, the method of 3-D profile reconstruction is recommended, and the experiment result is obtained as well.

Key words: 3-D profile, parallel detecting, microlens array, astigmatism

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