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应用科学学报 ›› 2005, Vol. 23 ›› Issue (3): 265-268.

• 论文 • 上一篇    下一篇

新型CNT-FED栅极结构表面二次电子发射研究

王琦龙1, 雷威1, 张晓兵1, 狄云松2, 周雪东1, 刘敏1   

  1. 1. 东南大学电子工程系, 江苏南京 210096;
    2. 南京师范大学物科院, 江苏南京 210097
  • 收稿日期:2004-04-23 修回日期:2004-06-23 出版日期:2005-05-31 发布日期:2005-05-31
  • 作者简介:王琦龙(1976-),男,安徽蚌埠人,博士生,E-mail:northrockwql@seu.edu.cn;雷威(1967-),男,四川成都人,教授,博导.
  • 基金资助:
    国家"973"(2003CB314706);教育部博士点基金(20030286003);东南大学科技基金(XJ030611,XJ030612)资助项目

Secondary Electron Emission from Surface of Novel Gate Structure in CNT-FED

WANG Qi-long1, LEI Wei1, ZHANG Xiao-bing1, DI Yun-song2, ZHOU Xue-dong1, LIU Min1   

  1. 1. Department of Electronic Engineering, Southeast University, Nanjing 210096, China;
    2. Department of Physics & Technology, Nanjing Normal University, Nanjing 210097, China
  • Received:2004-04-23 Revised:2004-06-23 Online:2005-05-31 Published:2005-05-31

PDF

65

被引次数

2

摘要： 提出了一种简单可行的CNT-FED栅极制备方法,即采用金属网板作为栅极,网板上下表面同样制备一定厚度的介质层,网板表面和内通道壁上蒸发MgO和MgF2薄膜,一次电子在电场作用下轰击薄膜层将激发大量二次电子和背散射电子,弥补了栅极对初始电子的截获,提高了器件发射电流密度和发光亮度.文中对该模型中二次电子发射过程进行了数值模拟计算并进行了相关验证实验.

关键词: 碳纳米管, 场致发射显示, 二次电子发射, 蒙特卡罗法

Abstract: In this paper, a new gate structure, a metal mesh with cone funnels is proposed.MgO film and MgF2 film are deposited on the surfaces of the mesh and the funnels by evaporation.When the primary electrons bombard on the gate electrode with initial energy, the secondary electrons and backscatters are generated.The brightness of the novel triode structure CNT-FED increases.Simulation of secondary electron emission is done with Monte-Carlo.CNT-FED devices with the new type of gate structure are fabricated.The results of emission experiments are also shown in this paper.

Key words: Monte Carlo method, carbon nanotube, secondary electron emission, field emission display

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