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应用科学学报 ›› 2006, Vol. 24 ›› Issue (4): 429-432.

• 论文 • 上一篇    下一篇

溶胶-凝胶法制备的BaTiO3薄膜表面态

陈海涛, 胡界博, 娄辉, 蔡洪涛, 丁玲红, 张伟风   

  1. 河南大学物理与信息光电子学院, 河南开封 475001
  • 收稿日期:2005-01-28 修回日期:2005-06-13 出版日期:2006-07-31 发布日期:2006-07-31
  • 通信作者: 张伟风,教授,博导,研究方向:钙钛矿结构铁电和光电薄膜特性,E-mail:wfzhang@henu.edu.cn E-mail:wfzhang@henu.edu.cn
  • 基金资助:
    河南省高等学校创新人才培养工程资助课题

Surface States of Sol-gel Derived BaTiO3 Thin Films

CHEN Hai-tao, HU Jie-bo, LOU Hui, CAI Hong-tao, DING Ling-hong, ZHANG Wei-feng   

  1. School of Physics and Information Optoelectronics, Henan University, Kaifeng 475001, China
  • Received:2005-01-28 Revised:2005-06-13 Online:2006-07-31 Published:2006-07-31

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摘要： 用溶胶-凝胶法和快速退火工艺在SiO2/Si(111)基片上生长了钙钛矿结构BaTiO3薄膜.用X射线光电子能谱技术(XPS)和角分辨X射线光电子能谱技术(ARXPS)研究了薄膜的表面化学态以及最顶层的原子种类和分布状况,结果显示在热处理过程中薄膜表面形成一层富含BaO的非计量钛氧化物层,并且钡-钛原子浓度比随着探测深度的增大而逐渐减小.

关键词: 溶胶-凝胶法, BaTiO3薄膜, ARXPS, XPS, 表面态

Abstract: Perovskite BaTiO3 thin films were grown on SiO2/Si (111) substrates by a sol-gel process and rapid thermal annealing (RTA).Surface states and the topmost surface atoms of the BaTiO3 thin films were analyzed by X-ray photoelectron spectroscopy (XPS) and angle-resolved X-ray photo electron spectroscopy (ARXPS).The results show that the as-fired BaTiO3 thin films have an enriched-BaO nonstoichiometric surface layer that can be removed by Ar+ ion sputtering, and the atomic ratio of Ba to Ti decreases with a decreasing depth from the film surface.

Key words: BaTiO3 thin film, ARXPS, surface state, XPS, sol-gel process

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