ICP源平面微带螺旋天线参数对性能的影响

应用科学学报

ICP源平面微带螺旋天线参数对性能的影响

周蓓廖斌朱守正

华东师范大学信息学院电子系，上海，200062

收稿日期:2006-09-01 修回日期:2007-04-03 出版日期:2007-07-30 发布日期:2007-07-30

Parameters' Impact on Performance of Antenna in Planar Microstrip Spiral ICP Source

ZHOU Bei,LIAO Bin, ZHU Shou-zheng

Department of Electronic Engineering,East China Normal University,Shanghai 200062,China

Received:2006-09-01 Revised:2007-04-03 Online:2007-07-30 Published:2007-07-30

摘要/Abstract

摘要： 分析了平面电感耦合微波等离子体源(ICP)的基本理论，根据其等效电路设计了一个谐振频率在2.45GHz的平面微带螺旋天线，通过建模进行仿真优化，并提出减小损耗的方法。研究发现，螺旋线圈的尺寸是影响谐振频率和Q值的关键因素。这为小功率电感耦合微波等离子体源的进一步研究提供了理论基础。

关键词: 电感耦合微波等离子体源(ICP), 平面微带螺旋天线, 数值仿真

Abstract: In this paper, theoretical analysis of inductivity-coupled microwave plasma source (ICP) is presented. According to its equivalent circuit, a planar microstrip spiral antenna with resonant frequency at 2.45GHz is designed. The antenna is simulated and optimized based on modeling, and the loss reduction method is proposed. The dimensions of coil are found to be the key factors having significant impact on resonance frequency and quality factor. Theoretical foundation is obtained for further research on low power planar spiral inductively-coupled microwave plasma source.

Key words: Inductively-coupled microwave plasma source (ICP), planar microstrip spiral antenna, numerical simulation

周蓓;廖斌;朱守正. ICP源平面微带螺旋天线参数对性能的影响[J]. 应用科学学报.

ZHOU Bei;LIAO Bin;ZHU Shou-zheng. Parameters' Impact on Performance of Antenna in Planar Microstrip Spiral ICP Source[J]. Journal of Applied Sciences.