圆筒型永磁同步直线电机大行程无过冲纳米定位驱动

应用科学学报 ›› 2010, Vol. 28 ›› Issue (1): 90-94.

圆筒型永磁同步直线电机大行程无过冲纳米定位驱动

徐从裕，余晓芬，程伶俐

合肥工业大学仪器科学与光电工程学院，合肥230009

收稿日期:2009-03-02 修回日期:2009-10-30 出版日期:2010-01-20 发布日期:2010-01-20
作者简介:徐从裕，博士，副教授，研究方向：微纳米驱动与测量控制，E-mail:ahhf-xcy@163.com
基金资助:
国家自然科学基金(No.50775063)；合肥工业大学科学研究发展基金(No.GDBJ2008-025)资助

Large Travel Range Nanopositioning Actuation without Overshooting for Tubular Permanent Magnet Synchronous Linear Motor

XU Cong-yu, YU Xiao-fen, CHENG Ling-li

School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology,
Hefei 230009, China

Received:2009-03-02 Revised:2009-10-30 Online:2010-01-20 Published:2010-01-20

摘要/Abstract

摘要：

为减少圆筒型永磁同步直线电机(TPMSLM)在直接驱动方式下的电磁扰动对纳米定位的影响，研究
了TPMSLM定子与动子偏心安装的驱动模式，用于改变TPMSLM内部空间磁场分布，使包含电磁扰动的轴向电
磁推力得到有效衰减，同时产生包含电磁扰动的径向电磁力，当两者与导轨摩擦阻尼共同作用时，可实现对电磁扰
动的有效吸收. 针对TPMSLM定位过冲，研究了变系数PI控制算法，用于实时改变系统的动静态驱动特性，达到
对大行程驱动和纳米定位驱动的最佳控制. 实验表明，TPMSLM偏心驱动模式及变系数PI控制算法能较好地满足
大行程无过冲定位驱动和稳态定位波动小于10 nm的要求.

关键词: 圆筒型永磁同步直线电机, 变系数PI控制算法, 无过冲驱动, 纳米定位

Abstract:

Abstract: To reduce electromagnetic disturbance of nanopositioning caused by direct actuation of cylindrical
permanent magnet synchronous linear motor (TPMSLM), the actuation mode of rotor and stator’s eccentric
installation of TPMSLM is studied. The actuation mode changes the interior space magnetic field distribution
of TPMSLM, therefore the axial electromagnetic force containing electromagnetic disturbance is decreased and
the radial electromagnetic force containing electromagnetic disturbance is produced. When guide damping is
added, a large amount of electromagnetic disturbance can be absorbed. Further more, to prevent large positioning
overshooting, a PI control algorithm with variable coefficients is studied, which changes dynamical
and static actuation characteristics of system in real-time to supply optimal control parameters for large travel
range actuation and nanopositioning actuation. Experimental results indicate that, using the eccentric actuation
mode and variable coefficient PI control algorithm, large travel range positioning actuation without
overshooting and accurate positioning with errors less than 10 nm are achieved.

Key words: TPMSLM, PI control algorithm with variable coefficients, actuation without overshooting, nanopositioning

中图分类号:

TM359.4

徐从裕，余晓芬，程伶俐. 圆筒型永磁同步直线电机大行程无过冲纳米定位驱动[J]. 应用科学学报, 2010, 28(1): 90-94.

XU Cong-yu, YU Xiao-fen, CHENG Ling-li. Large Travel Range Nanopositioning Actuation without Overshooting for Tubular Permanent Magnet Synchronous Linear Motor[J]. Journal of Applied Sciences, 2010, 28(1): 90-94.