多层结构的X射线双晶衍射研究

应用科学学报 ›› 1995, Vol. 13 ›› Issue (3): 347-351.

多层结构的X射线双晶衍射研究

武蕴忠¹, 许学敏¹, 王渭源¹, 滕琴²

1. 中国科学院上海治金研究所;
2. 中国科学院上海硅酸盐研究所

收稿日期:1993-08-06 修回日期:1993-11-28 出版日期:1995-09-30 发布日期:1995-09-30
基金资助:
国家自然科学基金和中国科学院上海功能材料与器件研究中心资助项目

STUDY OF MULTILAYER STRUCTURE USING X-RAY DOUBLE CRYSTAL DIFFRACTION

WU YUNZHONG¹, XU XUEMING¹, WANG WEIYUAN¹, TENG QIN²

1. Shanghai Institute of Metallurgy, Academia Science;
2. Shanghai Institute of Oeramics, Acodsmia Science

Received:1993-08-06 Revised:1993-11-28 Online:1995-09-30 Published:1995-09-30

摘要/Abstract

摘要： 用X射线双晶衍射术研究了玻璃薄层-铂膜-α-Al₂O₃多层结构。发现不同材料的玻璃层,使多层结构因热失配对铂膜产生不同的应力。对铂薄膜电阻器件的测量结果表明:应力引起器件的电阻值变化;不同的应力状态,产生不同方向的附加电阻。选择适当材料的玻璃层,使热失配在铂膜内产生相反的应力,从而造成相反的附加电阻。以这种应力补偿方法提高了薄膜铂电阻的可靠性。

关键词: 热应力, X射线双晶衍射, 热失配, 附加电阻

Abstract: The multilayer strncture composed of a glass film, a platinumfilm and an α-Al₂O₃ substrate has been studied by using the technique ofX-ray double crystal diffraction and it is found that different glass materials result in different stresses in the Pt film caused by thermal mismatch within the multilayer materials. The measuring results of the thin film platinum resistor show that the stresses will induce resistance change of the device and different stress status will produce added resistance in different directions. Selecting proper glass materials can make opposite stress in Pt film and opposite anded resistance due to thermal mismatch. The reliability of Pt resistor has been raised with the method of this stress compensation.

Key words: X-ray double crystal diffraction, added resistance, Thermal stress, thermal mismatch

武蕴忠, 许学敏, 王渭源, 滕琴. 多层结构的X射线双晶衍射研究[J]. 应用科学学报, 1995, 13(3): 347-351.

WU YUNZHONG, XU XUEMING, WANG WEIYUAN, TENG QIN. STUDY OF MULTILAYER STRUCTURE USING X-RAY DOUBLE CRYSTAL DIFFRACTION[J]. Journal of Applied Sciences, 1995, 13(3): 347-351.